Impact of strained-silicon-on-insulator (sSOI) substrate on FinFET mobility
Xiong, W., Cleavelin, C.R., Kohli, P., Huffman, C., Schulz, T., Schruefer, K., Gebara, G., Mathews, K., Patruno, P., Le Vaillant, Y.-M., Cayrefourcq, I., Kennard, M., Mazure, C., Shin, K., Liu, T.-J.K.
Published in IEEE electron device letters (01.07.2006)
Published in IEEE electron device letters (01.07.2006)
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Journal Article
Investigation of strain states and thermal stability of strained-Si-on-Insulator (sSOI) structures
Hoshi, Y., Fukumoto, A., Sawano, K., Cayrefourcq, I., Yoshimi, M., Shiraki, Y.
Published in Thin solid films (03.11.2008)
Published in Thin solid films (03.11.2008)
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Journal Article
Conference Proceeding
Stress Hybridization for Multigate Devices Fabricated on Supercritical Strained-SOI (SC-SSOI)
Collaert, N., Rooyackers, R., De Keersgieter, A., Leys, F.E., Cayrefourcq, I., Ghyselen, B., Loo, R., Jurczak, M.
Published in IEEE electron device letters (01.07.2007)
Published in IEEE electron device letters (01.07.2007)
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Journal Article
Angle-resolved XPS study of thin oxides after wet cleaning on Si0.8 Ge0.2 substrates
Martinez, E., Abbadie, A., Renault, O., Cayrefourcq, I., Quiais-Marthon, S.
Published in Surface and interface analysis (01.04.2006)
Published in Surface and interface analysis (01.04.2006)
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Journal Article
Conference Proceeding
Ultra-thin strained SOI substrate analysis by pseudo-MOS measurements
Gallon, C., Fenouillet-Beranger, C., Bresson, N., Cristoloveanu, S., Allibert, F., Bord, S., Aulnette, C., Delille, D., Latu-Romain, E., Hartmann, J.M., Ernst, T., Andrieu, F., Campidelli, Y., Ghyselen, B., Cayrefourcq, I., Fournel, F., Kernevez, N., Skotnicki, T.
Published in Microelectronic engineering (01.06.2005)
Published in Microelectronic engineering (01.06.2005)
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Journal Article
Conference Proceeding
New layer transfers obtained by the SmartCut process
MORICEAU, H, FOURNEL, F, SOUBIE, A, BIASSE, B, SOUSBIE, N, SARTORI, S, MICHAUD, J. F, LETERTRE, F, RAYSSAC, O, CAYREFOURCQ, I, RICHTARCH, C, DAVAL, N, ASPAR, B, AULNETTE, C, AKATSU, T, OSTERNAUD, B, GHYSELEN, B, MAZURE, C, BATAILLOU, B, BEAUMONT, A, MORALES, C, CARTIER, A. M, POCAS, S, LAGAHE, C, JALAGUIER, E
Published in Journal of electronic materials (01.08.2003)
Published in Journal of electronic materials (01.08.2003)
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Conference Proceeding
Journal Article
Strain-Enhanced CMOS Through Novel Process-Substrate Stress Hybridization of Super-Critically Thick Strained Silicon Directly on Insulator (SC-SSOI)
Mazure, C., Cayrefourcq, I., Mogab, J., Venkatesan, S., White, B.E., Nguyen, B.-Y., White, T., Burnett, D., La, L.-B., Backer, S., Prabhu, L., Dhandapani, V., Goolsby, B., Wang, X.-D., Goedeke, D., Filipiak, S., Spencer, G., Murphy, S., Shi, Z.-H., Gu, B., Grudowski, P., Desjardin, H., Canonico, M., Conner, J., Adams, V., Vartanian, V., Zhang, D., Thean, A.V.-Y.
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
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Conference Proceeding
Straightforward Integration Flow of a Silicon-Containing Block Copolymer for Line–Space Patterning
Legrain, Antoine, Fleury, Guillaume, Mumtaz, Muhammad, Navarro, Christophe, Arias-Zapata, Javier, Chevalier, Xavier, Cayrefourcq, Ian, Zelsmann, Marc
Published in ACS applied materials & interfaces (13.12.2017)
Published in ACS applied materials & interfaces (13.12.2017)
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Journal Article
Recent Achievements in Sub-10 nm DSA Lithography for Line/Space Patterning
Navarro, Christophe, Nicolet, Celia, Ariura, Fumi, Chevalier, Xavier, Xu, Kui, Hockey, Mary Ann, Mumtaz, Muhammad, Fleury, Guillaume, Hadziioannou, Georges, Legrain, Antoine, Zelsmann, Marc, Gharbi, Ahmed, Tiron, Raluca, Pain, Laurent, Evangelio, Laura, Fernandez-Regulez, Marta, Perez-Murano, Francesc, Cayrefourcq, Ian
Published in Journal of Photopolymer Science and Technology (01.01.2017)
Published in Journal of Photopolymer Science and Technology (01.01.2017)
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Journal Article
Hydrogen implantation-induced defects in bulk Si studied by Raman spectrometry
Villeneuve, C., Paillard, V., Bourdelle, K.K., Cayrefourcq, I., Boussagol, A., Kennard, M.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.12.2006)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.12.2006)
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Journal Article
Splitting kinetics of Si0.8Ge0.2 layers implanted with H or sequentially with He and H
Nguyen, Phuong, Bourdelle, K. K., Aulnette, C., Lallement, F., Daix, N., Daval, N., Cayrefourcq, I., Letertre, F., Mazuré, C., Bogumilowicz, Y., Tauzin, A., Deguet, C., Cherkashin, N., Claverie, A.
Published in Journal of applied physics (01.12.2008)
Published in Journal of applied physics (01.12.2008)
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Journal Article
Mechanism of the Smart Cut™ layer transfer in silicon by hydrogen and helium coimplantation in the medium dose range
Nguyen, Phuong, Cayrefourcq, I., Bourdelle, K. K., Boussagol, A., Guiot, E., Ben Mohamed, N., Sousbie, N., Akatsu, T.
Published in Journal of applied physics (15.04.2005)
Published in Journal of applied physics (15.04.2005)
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Journal Article
Splitting kinetics of Si$_{0.8}$Ge$_{0.2}$ layers implanted with H or sequentially with He and H
Nguyen, P., Bourdelle, K.K., Aulnette, C., Lallement, F., Daix, N., Daval, N., Cayrefourcq, I., Letertre, F., Mazuré, C., Bogumilowicz, Y., Tauzin, A., Deguet, C., Cherkashin, Nikolay, Claverie, Alain
Published in Journal of applied physics (2008)
Published in Journal of applied physics (2008)
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Journal Article
Splitting kinetics of Si 0.8 Ge 0.2 layers implanted with H or sequentially with He and H
Nguyen, Phuong, Bourdelle, K. K., Aulnette, C., Lallement, F., Daix, N., Daval, N., Cayrefourcq, I., Letertre, F., Mazuré, C., Bogumilowicz, Y., Tauzin, A., Deguet, C., Cherkashin, N., Claverie, A.
Published in Journal of applied physics (09.12.2008)
Published in Journal of applied physics (09.12.2008)
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Journal Article
Performance Enhancement of MUGFET Devices Using Super Critical Strained-SOI (SC-SSOI) and CESL
Collaert, N., Rooyackers, R., Clemente, F., Zimmerman, P., Cayrefourcq, I., Ghyselen, B., San, K., Eyckens, B., Jurczak, M., Biesemans, S.
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
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Conference Proceeding
Mechanism of the Smart Cut™ layer transfer in silicon by hydrogenand helium coimplantation in the medium dose range
Nguyen, Phuong, Cayrefourcq, I., Bourdelle, K. K., Boussagol, A., Guiot, E., Ben Mohamed, N., Sousbie, N., Akatsu, T.
Published in Journal of applied physics (07.04.2005)
Published in Journal of applied physics (07.04.2005)
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Journal Article
Angle‐resolved XPS study of thin oxides after wet cleaning on Si 0.8 Ge 0.2 substrates
Martinez, E., Abbadie, A., Renault, O., Cayrefourcq, I., Quiais‐Marthon, S.
Published in Surface and interface analysis (01.04.2006)
Published in Surface and interface analysis (01.04.2006)
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Journal Article
Effectiveness of Embedded-SiGe in Strained-SOI Substrates and Implications on Embedded-SiGe Stress Transfer Mechanics
Wei, Andy, Kammler, Thorsten, Cayrefourcq, Ian, Höntschel, J., Mowry, A., Bierstedt, H., Hellmich, A., Hempel, K., Rinderknecht, J., Trui, B., Otterbach, R., Horstmann, M., Metral, F., Kennard, Mark, Guiot, Eric
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article