Fabrication of size-controlled 10-nm scale Si pillars using metal clusters as formation nuclei
Tada, T., Kanayama, T., Koga, K., Seeger, K., Carroll, S.J., Weibel, P., Palmer, R.E.
Published in Microelectronic engineering (01.03.1998)
Published in Microelectronic engineering (01.03.1998)
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