Compact high power laser-plasma X-ray source for lithography
Gaeta, C.J., Rieger, H., Turcu, I.C.E., Forber, R.A., Campeau, S.M., Cassidy, K.L., Powers, M.F., Grygier, R.K., Maldonado, J.R., French, G., Naunguyan, J., Kelsy, C., Hark, P., Morris, J.H., Foster, R.M.
Published in Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) (2001)
Published in Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) (2001)
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