Mechanical property measurement of InP-based MEMS for optical communications
Pruessner, Marcel W., King, Todd T., Kelly, Daniel P., Grover, Rohit, Calhoun, Lynn C., Ghodssi, Reza
Published in Sensors and actuators. A. Physical. (15.07.2003)
Published in Sensors and actuators. A. Physical. (15.07.2003)
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Journal Article
Monolithic suspended optical waveguides for InP MEMS
Kelly, D.P., Pruessner, M.W., Amarnath, K., Datta, M., Kanakaraju, S., Calhoun, L.C., Ghodssi, R.
Published in IEEE photonics technology letters (01.05.2004)
Published in IEEE photonics technology letters (01.05.2004)
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Journal Article