Search Results - "Cain, Jason P" :: K.UTB vyhledávací portál

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Lithographic characterization of the spherical error in an extreme-ultraviolet optic by use of a programmable pupil-fill illuminator

by Naulleau, Patrick P, Cain, Jason P, Goldberg, Kenneth A
Published in Applied optics (2004) (20.03.2006)

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Value-Added Metrology

by Bunday, B., Allgair, J., Caldwell, M., Solecky, E., Archie, C., Rice, B., Singh, B., Cain, J., Emami, I.
Published in IEEE transactions on semiconductor manufacturing (01.08.2007)

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Extreme ultraviolet liithography capabilities at the advancedlight source using a 0.3-NA optic

by Naulleau, Patrick, Goldberg, Kenneth A., Cain, Jason P., Anderson, Erik H., Dean, Kim R., Denham, Paul, Hoef, Brian, Jackson,Keith H.
Published in IEEE journal of quantum electronics (01.01.2006)

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Extreme ultraviolet lithography capabilities at the advanced light source using a 0.3-NA optic : Extreme ultraviolet coherent sources and applications

by NAULLEAU, Patrick, GOLDBERG, Kenneth A, CAIN, Jason P, ANDERSON, Erik H, DEAN, Kim R, DENHAM, Paul, HOEF, Brian, JACKSON, Keith H
Published in IEEE journal of quantum electronics (2006)

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Extreme ultraviolet lithography capabilities at the advanced light source using a 0.3-NA optic

by Naulleau, P., Goldberg, K.A., Cain, J.P., Anderson, E.H., Dean, K.R., Denham, P., Hoef, B., Jackson, K.H.
Published in IEEE journal of quantum electronics (01.01.2006)

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Journal Article