Modular chemical delivery system
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Year of Publication 01.01.2018
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SUBSTRATE PROCESSING SYSTEM AND METHODS THEREOF
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Year of Publication 02.12.2010
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Year of Publication 02.12.2010
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Design of Quartz Chemical Delivery Parts for High Temperature Vacuum Chambers Base of Simulation Results / Yüksek Sıcaklık Vakum Odaları için Kuvars Kimyasal İletim Parçalarının Simülasyon Sonuçları Temelli Tasarımı
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Published in International Journal of Automotive Engineering and Technologies; Vol 4, No 1 (2015); 33 - 39 (30.03.2015)
Journal Article
Substrate support with substrate heater and symmetric rf return
TZU, GWOUAN, CHANG, YU, CUI, ANQING, CUVALCI, OLKAN, KUANG, WILLIAM W
Year of Publication 01.06.2015
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Year of Publication 01.06.2015
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Apparatus and methods for symmetrical gas distribution with high purge efficiency
HUSTON, JOEL M, CUVALCI, OLKAN, KAO, CHIEN-TEH, CHANG, MEI, YUAN, XIAOXIONG, LAM, HYMAN
Year of Publication 16.09.2014
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Year of Publication 16.09.2014
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Visibility Measurement Technique Using Photographic Images
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Published in Association for Engineering Education - Engineering Library Division Papers (20.06.1999)
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Published in Association for Engineering Education - Engineering Library Division Papers (20.06.1999)
Conference Proceeding
Modular chemical delivery system
CHANG, YU, HUSTON, JOEL M, CUVALCI, OLKAN, KAO, CHIEN-TEH, CHANG, MEI, LAM, HYMAN W. H
Year of Publication 16.07.2014
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Year of Publication 16.07.2014
Patent
Substrate support with substrate heater and symmetric RF return
TZU, GWOUAN, CHANG, YU, CUVALCI, OLKAN, CUI, AN-QING, KUANG, WILLIAM W
Year of Publication 01.01.2013
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Year of Publication 01.01.2013
Patent