State of the Art and Future Perspectives in Advanced CMOS Technology
Radamson, Henry H., Zhu, Huilong, Wu, Zhenhua, He, Xiaobin, Lin, Hongxiao, Liu, Jinbiao, Xiang, Jinjuan, Kong, Zhenzhen, Xiong, Wenjuan, Li, Junjie, Cui, Hushan, Gao, Jianfeng, Yang, Hong, Du, Yong, Xu, Buqing, Li, Ben, Zhao, Xuewei, Yu, Jiahan, Dong, Yan, Wang, Guilei
Published in Nanomaterials (Basel, Switzerland) (07.08.2020)
Published in Nanomaterials (Basel, Switzerland) (07.08.2020)
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Miniaturization of CMOS
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Published in Micromachines (Basel) (30.04.2019)
Published in Micromachines (Basel) (30.04.2019)
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The Challenges of Advanced CMOS Process from 2D to 3D
Radamson, Henry, Zhang, Yanbo, He, Xiaobin, Cui, Hushan, Li, Junjie, Xiang, Jinjuan, Liu, Jinbiao, Gu, Shihai, Wang, Guilei
Published in Applied sciences (13.10.2017)
Published in Applied sciences (13.10.2017)
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Effect of hydrogen content on dielectric strength of the silicon nitride film deposited by ICP-CVD
Zhang, Yudong, Tang, Jiale, Hu, Yongjie, Yuan, Jie, Guan, Lulu, Li, Xingyu, Cui, Hushan, Ding, Guanghui, Shi, Xinying, Xu, Kaidong, Zhuang, Shiwei
Published in Chinese physics B (01.04.2021)
Published in Chinese physics B (01.04.2021)
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Journal Article
CMOS Scaling for the 5 nm Node and Beyond: Device, Process and Technology
Radamson, Henry H, Miao, Yuanhao, Zhou, Ziwei, Wu, Zhenhua, Kong, Zhenzhen, Gao, Jianfeng, Yang, Hong, Ren, Yuhui, Zhang, Yongkui, Shi, Jiangliu, Xiang, Jinjuan, Cui, Hushan, Lu, Bin, Li, Junjie, Liu, Jinbiao, Lin, Hongxiao, Xu, Haoqing, Li, Mengfan, Cao, Jiaji, He, Chuangqi, Duan, Xiangyan, Zhao, Xuewei, Su, Jiale, Du, Yong, Yu, Jiahan, Wu, Yuanyuan, Jiang, Miao, Liang, Di, Li, Ben, Dong, Yan, Wang, Guilei
Published in Nanomaterials (Basel, Switzerland) (09.05.2024)
Published in Nanomaterials (Basel, Switzerland) (09.05.2024)
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Impact of TaN as Wet Etch Stop Layer on Device Characteristics for Dual-Metal HKMG Last Integration CMOSFETs
Tang, Zhaoyun, Xu, Jing, Yang, Hong, Cui, Hushan, Tang, Bo, Xu, Yefeng, Wang, Hongli, Li, Junfeng, Yan, Jiang
Published in IEEE electron device letters (01.12.2013)
Published in IEEE electron device letters (01.12.2013)
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Planar Bulk MOSFETs With Self-Aligned Pocket Well to Improve Short-Channel Effects and Enhance Device Performance
Yanbo Zhang, Huilong Zhu, Hao Wu, Yongkui Zhang, Zhiguo Zhao, Jian Zhong, Hong Yang, Qingqing Liang, Dahai Wang, Junfeng Li, Cheng Jia, Jinbiao Liu, Yuyin Zhao, Chunlong Li, Lingkuan Meng, Peizhen Hong, Junjie Li, Qiang Xu, Jianfeng Gao, Xiaobin He, Yihong Lu, Yue Zhang, Tao Yang, Yao Wang, Hushan Cui, Chao Zhao, Huaxiang Yin, Huicai Zhong, Haizhou Yin, Jiang Yan, Wenwu Wang, Dapeng Chen, Hongyu Yu, Yang, Simon, Tianchun Ye
Published in IEEE transactions on electron devices (01.05.2015)
Published in IEEE transactions on electron devices (01.05.2015)
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Investigation of TiAlC by Atomic Layer Deposition as N Type Work Function Metal for FinFET
Xiang, Jinjuan, Li, Tingting, Zhang, Yanbo, Wang, Xiaolei, Gao, Jianfeng, Cui, Hushan, Yin, Huaxiang, Li, Junfeng, Wang, Wenwu, Ding, Yuqiang, Xu, Chongying, Zhao, Chao
Published in ECS journal of solid state science and technology (01.01.2015)
Published in ECS journal of solid state science and technology (01.01.2015)
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Journal Article
Mitigation of Reverse Short-Channel Effect With Multilayer TiN/Ti/TiN Metal Gates in Gate Last PMOSFETs
Lichuan Zhao, Zhaoyun Tang, Bo Tang, Xueli Ma, Jinbiao Liu, Jinjuan Xiang, Jianfeng Gao, Chunlong Li, Xiaobin He, Cheng Jia, Mingzheng Ding, Hong Yang, Yefeng Xu, Jing Xu, Hongli Wang, Peng Liu, Peizhen Hong, Lingkuan Meng, Tingting Li, Wenjuan Xiong, Hao Wu, Junjie Li, Guilei Wang, Tao Yang, Hushan Cui, Yihong Lu, Xiaodong Tong, Jun Luo, Jian Zhong, Qiang Xu, Wenwu Wang, Junfeng Li, Huilong Zhu, Chao Zhao, Jiang Yan, Dapeng Chen, Yang, Simon, Tianchun Ye
Published in IEEE electron device letters (01.08.2014)
Published in IEEE electron device letters (01.08.2014)
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In-memory direct processing based on nanoscale perpendicular magnetic tunnel junctions
Cao, Kaihua, Cai, Wenlong, Liu, Yizheng, Li, Huisong, Wei, Jiaqi, Cui, Hushan, He, Xiaobin, Li, Junjie, Zhao, Chao, Zhao, Weisheng
Published in Nanoscale (07.12.2018)
Published in Nanoscale (07.12.2018)
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Characterization of Key Enzymes for D-lactic Acid Synthesis in Leuconostoc citreum KM20
Liu, Jinxi, Piao, Hongjie, Liu, Changlei, Li, Guanyang, Cui, Hushan, Jin, Qing
Published in Biotechnology and bioprocess engineering (01.12.2022)
Published in Biotechnology and bioprocess engineering (01.12.2022)
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Low-Temperature Performance of Nanoscale Perpendicular Magnetic Tunnel Junctions With Double MgO-Interface Free Layer
Cao, Kaihua, Li, Huisong, Cai, Wenlong, Wei, Jiaqi, Wang, Lezhi, Hu, Yanpeng, Jiang, Qifeng, Cui, Hushan, Zhao, Chao, Zhao, Weisheng
Published in IEEE transactions on magnetics (01.03.2019)
Published in IEEE transactions on magnetics (01.03.2019)
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In-memory direct processing based on nanoscale perpendicular magnetic tunnel junctionsElectronic supplementary information (ESI) available. See DOI: 10.1039/c8nr05928d
Cao, Kaihua, Cai, Wenlong, Liu, Yizheng, Li, Huisong, Wei, Jiaqi, Cui, Hushan, He, Xiaobin, Li, Junjie, Zhao, Chao, Zhao, Weisheng
Year of Publication 22.11.2018
Year of Publication 22.11.2018
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Interfacial property tuning of heavy metal/CoFeB for large density STT-MRAM
Wenlong Cai, Kaihua Cao, Mengxing Wang, Shouzhong Peng, Jiaqi Zhou, Anni Cao, Boyu Zhang, Lezhi Wang, Yu Zhang, Jiaqi Wei, Xiaobin He, Hushan Cui, Chao Zhao, Weisheng Zhao
Published in 2017 17th Non-Volatile Memory Technology Symposium (NVMTS) (01.08.2017)
Published in 2017 17th Non-Volatile Memory Technology Symposium (NVMTS) (01.08.2017)
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ZHU XINPAN, XU KAIDONG, CUI HUSHAN, CHENG SHIRAN, ZHANG HAO, ZHANG HUAIDONG, MENG QINGGUO, HU DONGDONG
Year of Publication 29.02.2024
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Year of Publication 29.02.2024
Patent
Damage free removal of nano-particles with dual-fluid spray nozzle cleaning
Yu Teng, Hushan Cui, Xiaobin He, Junjie Li, Jianghao Han, Qifeng Jiang, Xiaoyan Liu, Chao Zhao, Yi Wu
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
Published in 2016 China Semiconductor Technology International Conference (CSTIC) (01.03.2016)
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Conference Proceeding
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LIU PENGFEI, XU KAIDONG, YANG CHAOQUAN, CUI HUSHAN, YU XIANG, CHENG SHIRAN, ZHANG HUAIDONG, HU DONGDONG
Year of Publication 26.03.2024
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Year of Publication 26.03.2024
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온라인 샘플러 및 오염물 분석 시스템
XU KAIDONG, GUO DELIN, CUI HUSHAN, CHENG SHIRAN, YU XIANG, ZHANG HUAIDONG, ZOU ZHIWEN, HU DONGDONG
Year of Publication 29.02.2024
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Year of Publication 29.02.2024
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Study of sigma-shaped source/drain recesses for embedded-SiGe pMOSFETs
Qin, Changliang, Yin, Huaxiang, Wang, Guilei, Hong, Peizhen, Ma, Xiaolong, Cui, Hushan, Lu, Yihong, Meng, Lingkuan, Yin, Haizhou, Zhong, Huicai, Yan, Jiang, Zhu, Huilong, Xu, Qiuxia, Li, Junfeng, Zhao, Chao, Radamson, Henry H.
Published in Microelectronic engineering (05.09.2017)
Published in Microelectronic engineering (05.09.2017)
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