ALD 프로세스들을 위한 순차적인 펄스 및 퍼지
GRIFFIN KEVIN, SRIRAM MANDYAM, BALUJA SANJEEV, RASHEED MUHAMMAD M, CUI ANQING, AUBUCHON JOSEPH
Year of Publication 20.10.2022
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Year of Publication 20.10.2022
Patent
ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
TANG WEI V, CHANG YU, KUANG WILLIAM W, WU DIEN YEH, JANGRA VIKAS, YANG YIXIONG, YUAN XIAOXIONG, GANDIKOTA SRINIVAS, BU KYOUNG HO, RASHEED MUHAMMAD M, GUNGOR FARUK, CUI ANQING
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
Patent
ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
TANG WEI V, CHANG YU, KUANG WILLIAM W, WU DIEN YEH, JANGRA VIKAS, YANG YIXIONG, YUAN XIAOXIONG, GANDIKOTA SRINIVAS, BU KYOUNG HO, RASHEED MUHAMMAD M, GUNGOR FARUK, CUI ANQING
Year of Publication 20.08.2020
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Year of Publication 20.08.2020
Patent
MULTI-ZONE RESISTIVE HEATING APPARATUS, REACTOR INCORPORATING THE MULTI-ZONE RESISTIVE HEATING APPARATUS, HEATING SYSTEM FOR A CHEMICAL VAPOR DEPOSITION APPARATUS, AND METHOD FOR RESISTIVE HEATING OF SUBSTRATE
TRAN BINH, SMITH JACOB W, SEUTTER SEAN M, TAM ALEXANDER, IYER R. SURYANARAYANAN, YUDOVSKY JOSEPH, CUI ANQING
Year of Publication 04.05.2016
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Year of Publication 04.05.2016
Patent
ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
TANG WEI V, CHANG YU, KUANG WILLIAM W, WU DIEN YEH, JANGRA VIKAS, YANG YIXIONG, YUAN XIAOXIONG, GANDIKOTA SRINIVAS, BU KYOUNG HO, RASHEED MUHAMMAD M, GUNGOR FARUK, CUI ANQING
Year of Publication 16.06.2017
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Year of Publication 16.06.2017
Patent
Large-eddy simulation of coastal upwelling flow
CUI, Anqing, STREET, Robert L
Published in Environmental fluid mechanics (Dordrecht, Netherlands : 2001) (01.06.2004)
Published in Environmental fluid mechanics (Dordrecht, Netherlands : 2001) (01.06.2004)
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Journal Article
MULTI-ZONE RESISTIVE HEATING APPARATUS, REACTOR INCORPORATING THE MULTI-ZONE RESISTIVE HEATING APPARATUS, HEATING SYSTEM FOR A CHEMICAL VAPOR DEPOSITION APPARATUS, AND METHOD FOR RESISTIVE HEATING OF SUBSTRATE
TRAN BINH, SMITH JACOB W, SEUTTER SEAN M, TAM ALEXANDER, IYER R. SURYANARAYANAN, YUDOVSKY JOSEPH, CUI ANQING
Year of Publication 26.08.2014
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Year of Publication 26.08.2014
Patent
ALD cycle time reduction using process chamber lid with tunable pumping
Cui, Anqing, Mustafa, Muhannad, Sanchez, Mario D, Rasheed, Muhammad M
Year of Publication 06.08.2024
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Year of Publication 06.08.2024
Patent
MULTI-ZONE RESISTIVE HEATING APPARATUS, REACTOR INCORPORATING THE MULTI-ZONE RESISTIVE HEATING APPARATUS, HEATING SYSTEM FOR A CHEMICAL VAPOR DEPOSITION APPARATUS, AND METHOD FOR RESISTIVE HEATING OF SUBSTRATE
TRAN BINH, SMITH JACOB W, SEUTTER SEAN M, TAM ALEXANDER, IYER R. SURYANARAYANAN, YUDOVSKY JOSEPH, CUI ANQING
Year of Publication 15.05.2013
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Year of Publication 15.05.2013
Patent
ALD CYCLE TIME REDUCTION USING PROCESS CHAMBER LID WITH TUNABLE PUMPING
Cui, Anqing, Mustafa, Muhannad, Sanchez, Mario D, Rasheed, Muhammad M
Year of Publication 09.11.2023
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Year of Publication 09.11.2023
Patent
ALD cycle time reduction using process chamber lid with tunable pumping
Cui, Anqing, Mustafa, Muhannad, Sanchez, Mario D, Rasheed, Muhammad M
Year of Publication 26.09.2023
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Year of Publication 26.09.2023
Patent
CVD APPARATUS FOR IMPROVED FILM THICKNESS NON-UNIFORMITY AND PARTICLE PERFORMANCE
TRAN BINH, SEUTTER SEAN M, NGUYEN SON T, NGUYEN ANH N, HWANG BERNARD L, TAO XIANZHI, CUI ANQING
Year of Publication 21.03.2012
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Year of Publication 21.03.2012
Patent