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Air gap over transistor gate and related method
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Air gap over transistor gate and related method
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Year of Publication 18.12.2018
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LUFTSPALTISOLATIONSSTRUKTUREN
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Luftspalt über Transistorgate und entsprechender RFSOI-Schalter
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Year of Publication 30.03.2023
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AIR GAP OVER TRANSISTOR GATE AND RELATED METHOD
Jaffe Mark D, Stamper Anthony K, He Zhong-Xiang, Joseph Alvin J, Cucci Brett T, Wolf Randy L
Year of Publication 16.11.2017
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