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XU MING, CRUSE JAMES P, GOLD EZRA ROBERT, COBB CORIE LYNN, LEE JARED AHMAD, NGUYEN ANDREW, LANE JOHN W
Year of Publication 16.10.2014
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Year of Publication 16.10.2014
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PROCESS CHAMBERS HAVING SHARED RESOURCES AND METHODS OF USE THEREOF
XU MING, CRUSE JAMES P, SHEYNER ANCHEL, COBB CORIE LYNN, SALINAS MARTIN JEFF, LEE JARED AHMAD, NGUYEN ANDREW
Year of Publication 28.03.2013
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Year of Publication 28.03.2013
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APPARATUS FOR RADIAL DELIVERY OF GAS TO A CHAMBER AND METHODS OF USE THEREOF
PAL ANIRUDDHA, CRUSE JAMES P, GOLD EZRA ROBERT, SALINAS MARTIN JEFF, AGARWAL ANKUR, LEE JARED AHMAD, NGUYEN ANDREW
Year of Publication 07.03.2013
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Year of Publication 07.03.2013
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METHODS AND APPARATUS FOR RAPIDLY RESPONSIVE HEAT CONTROL IN PLASMA PROCESSING DEVICES
AKRISHNA AJIT, FOVELL RICHARD, CRUSE JAMES P, GOLD EZRA ROBERT, ZHANG CHUNLEI
Year of Publication 28.06.2011
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Year of Publication 28.06.2011
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TWIN CHAMBER PROCESSING SYSTEM
XU MING, LEE EVANS, CRUSE JAMES P, SHEYNER ANCHEL, GOLD EZRA ROBERT, COBB CORIE LYNN, SALINAS MARTIN JEFF, LEE JARED AHMAD, NGUYEN ANDREW, LANE JOHN W
Year of Publication 28.03.2013
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Year of Publication 28.03.2013
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METHODS AND APPARATUS FOR CALIBRATING FLOW CONTROLLERS IN SUBSTRATE PROCESSING SYSTEMS
XU MING, BUCKIUS DUC, CRUSE JAMES P, DARAN BERRIN, GREGOR MARIUSCH, COBB CORIE LYNN, NGUYEN ANDREW, LANE JOHN W
Year of Publication 12.03.2013
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Year of Publication 12.03.2013
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METHODS AND APPARATUS FOR REDUCING FLOW SPLITTING ERRORS USING ORIFICE RATIO CONDUCTANCE CONTROL
XU MING, CRUSE JAMES P, GOLD EZRA ROBERT, COBB CORIE LYNN, LEE JARED AHMAD, NGUYEN ANDREW, LANE JOHN W
Year of Publication 07.03.2013
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Year of Publication 07.03.2013
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METHOD AND APPARATUS OF A SUBSTRATE ETCHING SYSTEM AND PROCESS
OLSZEWSKI SCOTT, SINGH SARAVJEET, NANGOY ROY C, FARR JON C, SIRAJUDDIN KHALID, LEE JARED A, CRUSE JAMES P, BUCHBERGER DOUGLAS A, PAMARTHY SHARMA V, GOLD EZRA R, ZHANG CHUNLEI
Year of Publication 07.12.2010
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Year of Publication 07.12.2010
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Methods and apparatus for providing a gas mixture to a pair of process chambers
Lee Jared Ahmad, Cruse James P, Salinas Martin Jeffrey, Gold Ezra Robert
Year of Publication 07.03.2017
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Year of Publication 07.03.2017
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Methods and apparatus for rapidly responsive heat control in plasma processing devices
BALAKRISHNA AJIT, FOVELL RICHARD, CRUSE JAMES P, GOLD EZRA ROBERT, ZHANG CHUNLEI
Year of Publication 06.10.2015
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Year of Publication 06.10.2015
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Methods and apparatus for rapidly responsive heat control in plasma processing devices
BALAKRISHNA AJIT, FOVELL RICHARD, CRUSE JAMES P, GOLD EZRA ROBERT, ZHANG CHUNLEI
Year of Publication 25.11.2014
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Year of Publication 25.11.2014
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