SILICON HARDMASK LAYER FOR DIRECTED SELF-ASSEMBLY
HOCKEY MARY ANN, GUERRERO DOUGLAS J, COX ROBERT C, KRISHNAMURTHY VANDANA, WANG YUBAO
Year of Publication 21.01.2015
Get full text
Year of Publication 21.01.2015
Patent
METHOD FOR DIRECTED SELF-ASSEMBLY
COX, Robert C, HOCKEY, Mary Ann, WANG, Yubao, KRISHNAMURTHY, Vandana, GUERRERO, Douglas J
Year of Publication 15.01.2020
Get full text
Year of Publication 15.01.2020
Patent
Silicon hardmask layer for directed self-assembly
HOCKEY MARY ANN, GUERRERO DOUGLAS J, COX ROBERT C, KRISHNAMURTHY VANDANA, WANG YUBAO
Year of Publication 02.02.2016
Get full text
Year of Publication 02.02.2016
Patent
SILICON HARDMASK LAYER FOR DIRECTED SELF-ASSEMBLY
HOCKEY, MARY ANN, COX, ROBERT C, WANG, YUBAO, GUERRERO, DOUGLAS J, KRISHNAMURTHY, VANDANA
Year of Publication 25.11.2015
Get full text
Year of Publication 25.11.2015
Patent
METHOD FOR DIRECTED SELF-ASSEMBLY
HOCKEY, MARY ANN, COX, ROBERT C, WANG, YUBAO, GUERRERO, DOUGLAS J, KRISHNAMURTHY, VANDANA
Year of Publication 25.02.2015
Get full text
Year of Publication 25.02.2015
Patent
Silicon hardmask layer for directed self-assembly
HOCKEY MARY ANN, GUERRERO DOUGLAS J, COX ROBERT C, KRISHNAMURTHY VANDANA, WANG YUBAO
Year of Publication 25.02.2015
Get full text
Year of Publication 25.02.2015
Patent
SILICON HARDMASK LAYER FOR DIRECTED SELF-ASSEMBLY
HOCKEY, MARY ANN, COX, ROBERT C, WANG, YUBAO, GUERRERO, DOUGLAS J, KRISHNAMURTHY, VANDANA
Year of Publication 24.10.2013
Get full text
Year of Publication 24.10.2013
Patent
SILICON HARDMASK LAYER FOR DIRECTED SELF-ASSEMBLY
HOCKEY MARY ANN, GUERRERO DOUGLAS J, COX ROBERT C, KRISHNAMURTHY VANDANA, WANG YUBAO
Year of Publication 17.10.2013
Get full text
Year of Publication 17.10.2013
Patent