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Year of Publication 08.04.2004
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Year of Publication 08.04.2004
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REDUCED SPLATTERING OF UNPASSIVATED LASER FUSES
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Year of Publication 01.04.2004
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Year of Publication 01.04.2004
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Reduced splattering of unpassivated laser fuses
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Year of Publication 25.03.2004
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Year of Publication 25.03.2004
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Unpassivated laser fuse with blast barrier to reduce splattering
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Year of Publication 24.03.2004
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Year of Publication 24.03.2004
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Year of Publication 10.07.2007
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Year of Publication 10.07.2007
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Bilayered metal hardmasks for use in dual damascene etch schemes
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Year of Publication 10.07.2007
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Year of Publication 10.07.2007
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DALTON TIMOTHY, KUMAR KAUSHIK, KALTALIOGLU ERDEM, SCHACHT JOCHEN, LA TULIPE DOUGLAS C, CLEVENGER LARRY, COWLEY ANDY
Year of Publication 14.04.2005
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Year of Publication 14.04.2005
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Zero mask MIMcap process for a low k BEOL
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Year of Publication 24.10.2002
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Year of Publication 24.10.2002
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Zero mask MIMcap process for a low k BEOL
Felsner, Petra, Stetter, Michael, Augustin, Andreas, Brase, Gabriela, Cowley, Andy, Friese, Gerald
Year of Publication 24.10.2002
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Year of Publication 24.10.2002
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Dual damascene structure and method
Kumar, Kaushik, Dalton, Timothy, Clevenger, Larry, Cowley, Andy, La Tulipe, Douglas C, Hoinkis, Mark, Yang, Chih-Chao, Lin, Yi-Hsiung, Kaltalioglu, Erdem, Naujok, Markus, Schacht, Jochen
Year of Publication 15.08.2006
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Year of Publication 15.08.2006
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Zweischichtige Metallhartmasken zur Verwendung in Dual-Damascene-Ätzschemata und Verfahren zur Bereitstellung der Metallhartmasken
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Year of Publication 10.08.2006
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Year of Publication 10.08.2006
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Simultaneous native oxide removal and metal neutral deposition method
SIMON ANDREW, GRECO STEPHEN, FANG SUNFEI, WANG YUN, SPOONER TERRY, CLEVENGER LARRY, YANG CHIHAO, CHANDA KAUSHIK, COWLEY ANDY
Year of Publication 31.08.2004
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Year of Publication 31.08.2004
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Simultaneous native oxide removal and metal neutral deposition method
Yang, Chih-Chao, Wang, Yun, Clevenger, Larry, Simon, Andrew, Greco, Stephen, Chanda, Kaushik, Spooner, Terry, Cowley, Andy, Fang, Sunfei
Year of Publication 31.08.2004
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Year of Publication 31.08.2004
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Bilayered metal hardmasks for use in dual damascene etch schemes
DALTON TIMOTHY, KUMAR KAUSHIK, CLEVENGER LAWRENCE, KALTALIOGLU ERDEM, SIMON ANDREW H, SCHACHT JOCHEN, HOINKIS MARK, KALDOR STEFFEN K, LA TULIPE DOUGLAS C, COWLEY ANDY, YANG CHIHAO
Year of Publication 01.06.2006
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Year of Publication 01.06.2006
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Bilayered metal hardmasks for use in Dual Damascene etch schemes
Kumar, Kaushik, Clevenger, Lawrence, Dalton, Timothy, La Tulipe, Douglas C, Cowley, Andy, Kaltalioglu, Erdem, Schacht, Jochen, Simon, Andrew H, Hoinkis, Mark, Kaldor, Steffen K, Yang, Chih-Chao
Year of Publication 30.05.2006
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Year of Publication 30.05.2006
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Bilayered metal hardmasks for use in Dual Damascene etch schemes
DALTON TIMOTHY, KUMAR KAUSHIK, CLEVENGER LAWRENCE, KALTALIOGLU ERDEM, SIMON ANDREW H, SCHACHT JOCHEN, HOINKIS MARK, KALDOR STEFFEN K, LA TULIPE DOUGLAS C, COWLEY ANDY, YANG CHIHAO
Year of Publication 30.05.2006
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Year of Publication 30.05.2006
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OXIDIZED TANTALUM NITRIDE AS AN IMPROVED HARDMASK IN DUAL-DAMASCENE PROCESSING
AMERICA WILLIAM G, HOINKIS MARK, KUMAR KAUSHIK A, LA TULIPE DOUGLAS C.JR, CLEVENGER LARRY, COWLEY ANDY, DALTON TIMOTHY J
Year of Publication 22.09.2005
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Year of Publication 22.09.2005
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In-situ metal barrier deposition of sputter etching on interconnect structure
SIMON ANDREW H, GRECO STEPHEN, WANG YUN-YU, FANG SUNFEI, SPOONER TERRY, CLEVENGER LARRY, COWLEY ANDY, CHANDA KAUSHIK, YANG CHIHAO
Year of Publication 30.03.2005
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Year of Publication 30.03.2005
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