Pitch Reduction Technology Using Alternating Spacer Depositions During the Formation of a Semiconductor Device and Systems Including Same
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Year of Publication 14.07.2016
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Year of Publication 14.07.2016
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Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
NIROOMAND ARDAVAN, MENG SHUANG, ZHOU BAOSUO, ABATCHEV MIRZAFER K, MORGAN PAUL A, COPPA BRIAN J, GREELY JOSEPH NEIL
Year of Publication 05.04.2016
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Year of Publication 05.04.2016
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Pitch Reduction Technology Using Alternating Spacer Depositions During the Formation of a Semiconductor Device and Systems Including Same
NIROOMAND ARDAVAN, MENG SHUANG, ZHOU BAOSUO, ABATCHEV MIRZAFER K, MORGAN PAUL A, COPPA BRIAN J, GREELY JOSEPH NEIL
Year of Publication 22.01.2015
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Year of Publication 22.01.2015
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Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same
NIROOMAND ARDAVAN, MENG SHUANG, GREELEY JOSEPH N, ZHOU BAOSUO, ABATCHEV MIRZAFER K, MORGAN PAUL A, COPPA BRIAN J
Year of Publication 07.10.2014
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Year of Publication 07.10.2014
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Method to deposit conformal low temperature SiO2
MENG SHUANG, SMYTHE JOHN A, SANDHU GURTEJ S, COPPA BRIAN J, SURTHI SHYAM
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Method to deposit conformal low temperature SiO2
Smythe, John A, Sandhu, Gurtej S, Coppa, Brian J, Surthi, Shyam, Meng, Shuang
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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PITCH REDUCTION TECHNOLOGY USING ALTERNATING SPACER DEPOSITIONS DURING THE FORMATION OF A SEMICONDUCTOR DEVICE AND SYSTEMS INCLUDING SAME
ZHOU, BAOSUO, COPPA, BRIAN, J, GREELEY, JOSEPH, NIROOMAND, ARDAVAN, ABATCHEV, MIRZAFER, K, MORGAN, PAUL, A, MENG, SHUANG
Year of Publication 29.08.2011
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Year of Publication 29.08.2011
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METHOD TO DEPOSIT CONFORMAL LOW TEMPERATURE SIO2
SURTHI, SHYAM, COPPA, BRIAN, J, SANDHU, GURTEJ, S, SMYTHE, JOHN, A, MENG, SHUANG
Year of Publication 05.03.2009
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Year of Publication 05.03.2009
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METHOD TO DEPOSIT CONFORMAL LOW TEMPERATURE SIO2
SURTHI, SHYAM, COPPA, BRIAN, J, SANDHU, GURTEJ, S, SMYTHE, JOHN, A, MENG, SHUANG
Year of Publication 17.04.2008
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Year of Publication 17.04.2008
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Method to deposit conformal low temperature SiO2
MENG SHUANG, SMYTHE JOHN A, SANDHU GURTEJ S, COPPA BRIAN J, SURTHI SHYAM
Year of Publication 10.04.2008
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Year of Publication 10.04.2008
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