PATTERN ENHANCEMENT USING A GAS CLUSTER ION BEAM
DOBASHI KAZUYA, NISHINO MASARU, NEGROTTI JERRY, CONSOLI PAUL, OYAMA KENICHI, GWINN MATTHEW, OKABE NORIAKI, KOSAKA REO, KAMBARA HIROMITSU, FERNANDEZ LUIS, NATORI SAKURAKO
Year of Publication 18.03.2022
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Year of Publication 18.03.2022
Patent
Pattern enhancement using a gas cluster ion beam
OYAMA, KENICHI, KAMBARA, HIROMITSU, NATORI, SAKURAKO, GWINN, MATTHEW, OKABE, NORIAKI, KOSAKA, REO, FERNANDEZ, LUIS, CONSOLI, PAUL, DOBASHI, KAZUYA, NISHINO, MASARU, NEGROTTI, JERRY
Year of Publication 16.06.2022
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Year of Publication 16.06.2022
Patent