게르마늄 함유 반도체 디바이스 및 그 형성 방법
TAPILY KANDABARA N, WAJDA CORY, LEUSINK GERRIT J, CONSIGLIO STEVEN P, CLARK ROBERT D
Year of Publication 30.04.2018
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Year of Publication 30.04.2018
Patent
Physical and Electrical Properties of MOCVD Grown HfZrO 4 High-k Thin Films Deposited in a Production-Worthy 300 mm Deposition System
Consiglio, Steven P., Wajda, Cory, Nakamura, Genji, Clark, Robert, Aoyama, Shintaro, Leusink, Gert
Published in ECS transactions (16.04.2010)
Published in ECS transactions (16.04.2010)
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Journal Article
METHODS FOR FORMING DIELECTRIC MATERIALS WITH SELECTED POLARIZATION FOR SEMICONDUCTOR DEVICES
Consiglio, Steven P, Tapily, Kandabara N, Clark, Robert D, Triyoso, Dina H
Year of Publication 10.02.2022
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Year of Publication 10.02.2022
Patent
Methods for forming dielectric materials with selected polarization for semiconductor devices
TAPILY, KANDABARA N, TRIYOSO, DINA H, CONSIGLIO, STEVEN P, CLARK, ROBERT D
Year of Publication 16.04.2022
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Year of Publication 16.04.2022
Patent
GERMANIUM-CONTAINING SEMICONDUCTOR DEVICE AND METHOD OF FORMING
TAPILY, Kandabara N, CONSIGLIO, Steven P, WAJDA, Cory, LEUSINK, Gerrit J, CLARK, Robert D
Year of Publication 23.03.2017
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Year of Publication 23.03.2017
Patent
GERMANIUM-CONTAINING SEMICONDUCTOR DEVICE AND METHOD OF FORMING
Consiglio Steven P, Clark Robert D, Wajda Cory, Tapily Kandabara N, Leusink Gerrit J
Year of Publication 23.03.2017
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Year of Publication 23.03.2017
Patent
Atomic Layer Deposition of Aluminum-doped High-k Films
TAPILY KANDABARA N, WAJDA CORY, LEUSINK GERRIT J, CONSIGLIO STEVEN P, CLARK ROBERT D
Year of Publication 10.09.2015
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Year of Publication 10.09.2015
Patent
Nitridation of atomic layer deposited high-k dielectrics using trisilylamine
OMARJEE VINCENT, KUCHENBEISER GLENN, DUSSARRAT CHRISTIAN, PALLEM VENKAT, CONSIGLIO STEVEN P, CLARK ROBERT D
Year of Publication 23.06.2015
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Year of Publication 23.06.2015
Patent
Physical and Electrical Properties of MOCVD Grown HfZrO 4 High-k Thin Films Deposited in a Production-Worthy 300 mm Deposition System
Consiglio, Steven P., Wajda, Cory, Nakamura, Genji, Clark, Robert, Aoyama, Shintaro, Leusink, Gert
Published in Meeting abstracts (Electrochemical Society) (05.02.2010)
Published in Meeting abstracts (Electrochemical Society) (05.02.2010)
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Journal Article
NITRIDATION OF ATOMIC LAYER DEPOSITED HIGH-K DIELECTRICS USING TRISILYLAMINE
OMARJEE VINCENT, KUCHENBEISER GLENN, DUSSARRAT CHRISTIAN, PALLEM VENKAT, CONSIGLIO STEVEN P, CLARK ROBERT D
Year of Publication 16.01.2014
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Year of Publication 16.01.2014
Patent
GERMANIUM-CONTAINING SEMICONDUCTOR DEVICE AND METHOD OF FORMING
TAPILY, KANDABARA N, CONSIGLIO, STEVEN P, CLARK, ROBERT D, LEUSINK, GERRIT J, WAJDA, CORY
Year of Publication 11.04.2018
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Year of Publication 11.04.2018
Patent