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HAUF MARKUS, BLEIDISTEL SASCHA, KAZI ARIF, SCHWAER BAERBEL, TAYEBATI PAYAM, BITTNER BORIS, HUMMEL WOLFGANG, CONRADI OLAF, WEBER JOCHEN, HOLDERER HUBERT
Year of Publication 27.01.2011
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Year of Publication 27.01.2011
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Projection objective of a microlithographic projection exposure apparatus
HAUF MARKUS, BLEIDISTEL SASCHA, KAZI ARIF, SCHWAER BAERBEL, TAYEBATI PAYAM, BITTNER BORIS, HUMMEL WOLFGANG, CONRADI OLAF, WEBER JOCHEN, HOLDERER HUBERT
Year of Publication 09.11.2010
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Year of Publication 09.11.2010
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METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTIVE
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Year of Publication 06.02.2008
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Projection exposure system and projection exposure method
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Year of Publication 01.09.2014
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Year of Publication 01.09.2014
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Reflektives optisches Element für die EUV-Lithographie
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Year of Publication 12.06.2014
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Year of Publication 12.06.2014
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PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
HAUF MARKUS, BLEIDISTEL SASCHA, KAZI ARIF, SCHWAER BAERBEL, TAYEBATI PAYAM, BITTNER BORIS, HUMMEL WOLFGANG, CONRADI OLAF, WEBER JOCHEN, HOLDERER HUBERT
Year of Publication 02.10.2008
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Year of Publication 02.10.2008
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Projection exposure system operating method for microlithography, involves considering influence of optical characteristics of system or dependent parameters that are computed based on modes and object structure during system operation
SCHWAB, MARKUS, DITTMANN, OLAF, GRUNER, TORALF, DIECKMANN, NILS, TOTZECK, MICHAEL, KRAEMER, DANIEL, KAMENOV, VLADIMIR, CONRADI, OLAF
Year of Publication 18.01.2007
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Year of Publication 18.01.2007
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PROJECTION EXPOSURE APPARATUS AND METHOD FOR OPERATING THE SAME
GRUNER TORALF, SCHWAB MARKUS, TOTZECK MICHAEL, KAMENOV VLADIMIR, KRAEHMER DANIEL, HMANN OLAF D, CONRADI OLAF, DIECKMANN NILS
Year of Publication 03.01.2008
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Year of Publication 03.01.2008
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Microlithography projection objective
GRUNER TORALF, DODOC AURELIAN, EPPLE ALEXANDER, KAMENOV VLADIMIR, KRAEHMER DANIEL, KALLER JULIAN, OKON THOMAS, PERRIN JEAN-CLAUDE, FELDMANN HEIKO, CONRADI OLAF
Year of Publication 07.05.2009
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Year of Publication 07.05.2009
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MICROLITHOGRAPHY PROJECTION OBJECTIVE
GRUNER TORALF, DODOC AURELIAN, PERRIN JEAN CLAUDE, EPPLE ALEXANDER, KAMENOV VLADIMIR, KRAEHMER DANIEL, KALLER JULIAN, OKON THOMAS, FELDMANN HEIKO, CONRADI OLAF
Year of Publication 25.04.2008
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Year of Publication 25.04.2008
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