Search Results - "CONRADI OLAF" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

METHOD AND SYSTEM FOR CORRECTING IMAGE CHANGES

METHOD AND SYSTEM FOR CORRECTING IMAGE CHANGES

by GRUNER, TORALF, CONRADI, OLAF
Year of Publication 28.02.2008

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Patent

Reflective optical element for EUV lithography and method of manufacturing a reflective optical element

Reflective optical element for EUV lithography and method of manufacturing a reflective optical element

by Muellender Stephan, Wabra Norbert, Bittner Boris, Von Hodenberg Martin, Conradi Olaf, Enkisch Hartmut
Year of Publication 28.03.2017

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Patent

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY AND METHOD OF MANUFACTURING A REFLECTIVE OPTICAL ELEMENT

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY AND METHOD OF MANUFACTURING A REFLECTIVE OPTICAL ELEMENT

by BITTNER, Boris, CONRADI, Olaf, ENKISCH, Hartmut, MÜLLENDER, Stephan, WABRA, Norbert, VON HODENBERG, Martin
Year of Publication 22.03.2017

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Patent

Method for improving the imaging properties of a projection objective, and such a projection objective

Method for improving the imaging properties of a projection objective, and such a projection objective

by Hummel Wolfgang, Frommeyer Andreas, Gruner Toralf, Richter Gerald, Bleidistel Sascha, Conradi Olaf, Feldmann Heiko
Year of Publication 28.02.2017

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Patent

METHOD OF OPERATING A PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY

METHOD OF OPERATING A PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY

by Loering Ulrich, Mueller Ralf, Wald Christian, Totzeck Michael, Juergens Dirk, Conradi Olaf
Year of Publication 24.11.2016

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Patent

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY AND METHOD OF MANUFACTURING A REFLECTIVE OPTICAL ELEMENT

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY AND METHOD OF MANUFACTURING A REFLECTIVE OPTICAL ELEMENT

by WABRA, NORBERT, VON HODENBERG, MARTIN, ENKISCH, HARTMUT, MÜLLENDER, STEPHAN, BITTNER, BORIS, CONRADI, OLAF
Year of Publication 23.11.2016

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Patent

Method of operating a projection exposure tool for microlithography

Method of operating a projection exposure tool for microlithography

by Loering Ulrich, Mueller Ralf, Wald Christian, Totzeck Michael, Juergens Dirk, Conradi Olaf
Year of Publication 13.09.2016

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Patent

Microlithographic projection exposure apparatus with correction optical system that heats projection objective element

Microlithographic projection exposure apparatus with correction optical system that heats projection objective element

by DODOC AURELIAN, BLEIDISTEL SASCHA, KAZI ARIF, CONRADI OLAF
Year of Publication 08.07.2014

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Patent

SEMICONDUCTOR MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS

SEMICONDUCTOR MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS

by BLEIDISTEL SASCHA, KAZI ARIF, CONRADI OLAF
Year of Publication 22.03.2012

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Patent

Method for improving imaging properties of an optical system, and optical system

Method for improving imaging properties of an optical system, and optical system

by CONRADI OLAF
Year of Publication 25.11.2009

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Patent

Verfahren zur Herstellung eines optischen Systems einer Projektionsbestimmungsanlage für die Projektionslithographie

Verfahren zur Herstellung eines optischen Systems einer Projektionsbestimmungsanlage für die Projektionslithographie

by Conradi, Olaf, Golde, Daniel, Hembacher, Stefan, Nefzi, Marwene, Kneer, Bernhard
Year of Publication 12.09.2019

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Patent

Reflective Optical Element for EUV Lithography and Method of Manufacturing a Reflective Optical Element

Reflective Optical Element for EUV Lithography and Method of Manufacturing a Reflective Optical Element

by VON HODENBERG MARTIN, MUELLENDER STEPHAN, ENKISCH HARTMUT, BITTNER BORIS, WABRA NORBERT, CONRADI OLAF
Year of Publication 05.11.2015

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Patent

METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTIVE, AND SUCH A PROJECTION OBJECTIVE

METHOD FOR IMPROVING THE IMAGING PROPERTIES OF A PROJECTION OBJECTIVE, AND SUCH A PROJECTION OBJECTIVE

by GRUNER TORALF, BLEIDISTEL SASCHA, HUMMEL WOLFGANG, FELDMANN HEIKO, RICHTER GERALD, FROMMEYER ANDREAS, CONRADI OLAF
Year of Publication 15.10.2015

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Patent

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY AND METHOD OF MANUFACTURING A REFLECTIVE OPTICAL ELEMENT

REFLECTIVE OPTICAL ELEMENT FOR EUV LITHOGRAPHY AND METHOD OF MANUFACTURING A REFLECTIVE OPTICAL ELEMENT

by WABRA, NORBERT, VON HODENBERG, MARTIN, ENKISCH, HARTMUT, MÜLLENDER, STEPHAN, BITTNER, BORIS, CONRADI, OLAF
Year of Publication 14.10.2015

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Patent

Projection exposure system and projection exposure method

Projection exposure system and projection exposure method

by GRUNER TORALF, GRAESCHUS VOLKER, ULRICH WILHELM, ZACZEK CHRISTOPH, GRÄUPNER PAUL, CONRADI OLAF, BEIERL HELMUT
Year of Publication 29.09.2015

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Patent

Method and system for correcting image changes

Method and system for correcting image changes

by GRUNER TORALF, CONRADI OLAF
Year of Publication 13.03.2013

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Patent

Method for improving the imaging properties of a projection objective, and such a projection objective

Method for improving the imaging properties of a projection objective, and such a projection objective

by GRUNER TORALF, BLEIDISTEL SASCHA, HUMMEL WOLFGANG, FELDMANN HEIKO, RICHTER GERALD, FROMMEYER ANDREAS, CONRADI OLAF
Year of Publication 30.06.2015

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Patent

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY COMPRISING AN OPTICAL CORRECTION ARRANGEMENT

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY COMPRISING AN OPTICAL CORRECTION ARRANGEMENT

by KAZI, ARIF, BLEIDISTEL, SASCHA, CONRADI, OLAF
Year of Publication 25.11.2010

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Patent

MICROLITHOGRAPHY PROJECTION OBJECTIVE

MICROLITHOGRAPHY PROJECTION OBJECTIVE

by Kamenov Vladimir, Gruner Toralf, Epple Alexander, Kraehmer Daniel, Dodoc Aurelian, Perrin Jean-Claude, Kaller Julian, Conradi Olaf, Feldmann Heiko, Okon Thomas
Year of Publication 06.07.2017

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Patent

Verfahren zum Betreiben einer mikrolithographischen Projektionsbelichtungsanlage, sowie Projektionsbelichtungsanlage

Verfahren zum Betreiben einer mikrolithographischen Projektionsbelichtungsanlage, sowie Projektionsbelichtungsanlage

by Conradi, Olaf, Gruner, Toralf, Streefkerk, Bob
Year of Publication 24.11.2016

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Patent

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