Providing Key Process Enabling Vacuum Capability Through Integrated Sub-Fab Data Management
Collart, Erik, Mooney, Michael, Evason, Luke, Giorgi, Vincent, Hunt, David, Serapiglia, Antonio, Ifould, Alan
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
Published in 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2019)
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Conference Proceeding
Characterisation of low energy antimony (2-5 keV) implantation into silicon
Collart, E.J.H., Kirkwood, D., Van den Berg, J.A., Werner, M., Vandervorst, W., Brijs, B., Bailey, P., Noakes, T.C.Q.
Published in Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on (2002)
Published in Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on (2002)
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Conference Proceeding
Ultra-Shallow Junctions Formed by Co-Implantation and Sub-Melt Laser Annealing
Felch, Susan B., Falepin, Annelies, Severi, Simone, Augendre, Emmanuel, Noda, Taiji, Parihar, Vijay, Nouri, Faran, Hoffmann, Tom, Pawlak, Bartek, Eyben, Pierre, Vandervorst, Wilfried, Thirupapuliyur, Sunderraj, Schreutelkamp, Robert, Collart, Erik, Graoui, Houda
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article