METHOD FOR CALIBRATING SIMULATION PROCESS BASED ON DEFECT-BASED PROCESS WINDOW
SLACHTER, Abraham, TIMOSHKOV, Vadim Yourievich, HUNSCHE, Stefan, DILLEN, Hermanus Adrianus, WANG, Fuming, VAN LARE, Marie-Claire, RAGHUNATHAN, Sudharshanan, VAN INGEN SCHENAU, Koenraad, JIANG, Aiqin, KOOIMAN, Marleen, COLINA, Luis Alberto Colina Sant
Year of Publication 09.03.2023
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Year of Publication 09.03.2023
Patent