Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation processing
SORENSON MAX, SUN CHAO, SRUNAVUKARASU, SRIDHAR, COLASIDA MAYA OSCAR, MEHTA GAURAV, ELUMALAI, KRISHNAMURTHY, RAJAPAKSA DIMANTHA, PAPANU JAMES S, PEH ENG SHENG, ABINAND, SYLVIE
Year of Publication 05.08.2022
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Year of Publication 05.08.2022
Patent