Apparatuses for reducing metal residue in edge bead region from metal-containing resists
Meyers, Stephen T, Jiang, Kai, Telecky, Alan J, Cardineau, Brian J, Waller, Mollie, Clark, Benjamin L
Year of Publication 29.08.2023
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Year of Publication 29.08.2023
Patent
APPARATUSES FOR REDUCING METAL RESIDUE IN EDGE BEAD REGION FROM METAL-CONTAINING RESISTS
Meyers, Stephen T, Jiang, Kai, Telecky, Alan J, Cardineau, Brian J, Waller, Mollie, Clark, Benjamin L
Year of Publication 27.01.2022
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Year of Publication 27.01.2022
Patent
Apparatuses for reducing metal residue in edge bead region from metal-containing resists
Meyers, Stephen T, Jiang, Kai, Telecky, Alan J, Cardineau, Brian J, Waller, Mollie, Clark, Benjamin L
Year of Publication 30.11.2021
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Year of Publication 30.11.2021
Patent
APPARATUSES FOR REDUCING METAL RESIDUE IN EDGE BEAD REGION FROM METAL-CONTAINING RESISTS
Meyers, Stephen T, Jiang, Kai, Telecky, Alan J, Cardineau, Brian J, Waller, Mollie, Clark, Benjamin L
Year of Publication 02.07.2020
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Year of Publication 02.07.2020
Patent
Methods of reducing metal residue in edge bead region from metal-containing resists
Meyers, Stephen T, Jiang, Kai, Telecky, Alan J, Cardineau, Brian J, Waller, Mollie, Clark, Benjamin L
Year of Publication 21.04.2020
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Year of Publication 21.04.2020
Patent