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Year of Publication 09.11.2004
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Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto
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Year of Publication 30.11.2010
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Year of Publication 30.11.2010
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Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
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Year of Publication 27.05.2008
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Year of Publication 27.05.2008
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Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
BRULS RICHARD JOSEPH, UITTERDIJK TAMMO, VAN DIJCK HENDRIKUS ALPHONSUS LUDOVICUS, CICILIA ORLANDO SERAPIO, HOFMANS GERARDUS CAROLUS JOHANNUS
Year of Publication 27.05.2008
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Year of Publication 27.05.2008
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MASK
JASPER JOHANNES CHRISTIAAN MARIA, PONGERS WILLEM RICHARD, VAN DIJCK HENDRIKUS ALPHONSUS LUDOVICUS, BOOM HERMAN, JANSEN ALBERT JOHANNES MARIA, HOFMANS GERARDUS CAROLUS JOHANNUS, BRULS RICHARD JOSEPH, WEHRENS MARTIJN GERARD DOMINIQ, UITTERDIJK TAMMO, CICILIA ORLANDO SERAPIO, DEMARTEAU MARCEL JOHANNES LOUIS MARIE, BAGGEN MARCEL KOENRAAD MARIE, LUIJTEN CARLO CORNELIS MARIA
Year of Publication 07.08.2008
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Year of Publication 07.08.2008
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Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle
JASPER JOHANNES CHRISTIAAN MARIA, PONGERS WILLEM RICHARD, VAN DIJCK HENDRIKUS ALPHONSUS LUDOVICUS, BOOM HERMAN, JANSEN ALBERT JOHANNES MARIA, HOFMANS GERARDUS CAROLUS JOHANNUS, BRULS RICHARD JOSEPH, UITTERDIJK TAMMO, CICILIA ORLANDO SERAPIO, DEMARTEAU MARCEL JOHANNES LOUIS MARIE, WEHRENS MARTIJN GERARD DOMINIQUE, BAGGEN MARCEL KOENRAAD MARIE, LUIJTEN CARLO CORNELIS MARIA
Year of Publication 12.06.2008
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Year of Publication 12.06.2008
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LITHOGRAPHIC APPARATUS,DEVICE MANUFACTURING METHODS, MASK AND METHOD OF CHARACTERISING A MASK AND/OR PELLICLE
MARIA JASPER JOHANNES CHRISTIAAN, MARIE BAGGEN MARCEL KOENRAAD, MARIA LUIJTEN CARLO CORNELIS, DOMINIQUE WEHRENS MARTIJN GERARD, MARIA JANSEN ALBERT JOHANNES, TAMMO UITTERDIJK, SERAPIO CICILIA ORLANDO, RICHARD PONGERS WILLEM, LUDOVICUS VAN DIJCK HENDRIKUS ALPHONSUS, HERMAN BOOM, MARIE DEMARTEAU MARCEL JOHANNES LOUIS, JOHANNUS HOFMANS GERARDUS CAROLUS, JOSEPH BRULS RICHARD
Year of Publication 28.04.2008
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Year of Publication 28.04.2008
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Lithographic apparatus device manufacturing methods mask and method of characterising a mask and/or pellicle
JASPER JOHANNES CHRISTIAAN MARIA, PONGERS WILLEM RICHARD, BOOM HERMAN, JANSEN ALBERT JOHANNES MARIA, HOFMANS GERARDUS CAROLUS JOHANNUS, DIJK VAN HENDRIKUS ALPHONSUS LUDOVICUS, BRULS RICHARD JOSEPH, UITTERDIJK TAMMO, CICILIA ORLANDO SERAPIO, DEMARTEAU MARCEL JOHANNES LOUIS MARIE, WEHRENS MARTIJN GERARD DOMINIQUE, BAGGEN MARCEL KOENRAAD MARIE, LUIJTEN CARLO CORNELIS MARIA
Year of Publication 27.01.2006
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Year of Publication 27.01.2006
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHODS, MASK AND METHOD OF CHARACTERISING A MASK AND/OR PELLICLE
JANSEN, ALBERT JOHANNES MARIA, LUIJTEN, CARLO CORNELIS MARIA, WEHRENS, MARTIJN GERARD DOMINIQUE, HOFMANS, GERARDUS CAROLUS JOHANNUS, BOOM, HERMAN, BRULS, RICHARD JOSEPH, DEMARTEAU, MARCEL JOHANNES LOUIS MARIE, PONGERS, WILLEM RICHARD, VAN DIJCK, HENDRIKUS ALPHONSUS LUDOVICUS, BAGGEN, MARCEL KOENRAAD MARIE, JASPER, JOHANNES CHRISTIAAN MARIA, UITTERDIJK, TAMMO, CICILIA, ORLANDO SERAPIO
Year of Publication 09.03.2005
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Year of Publication 09.03.2005
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LITHOGRAPHY APPARATUS, DEVICE MANUFACTURING METHOD, MASK, METHOD OF CHARACTERIZING MASK AND/OR PELLICLE
JASPER JOHANNES CHRISTIAAN MARIA, PONGERS WILLEM RICHARD, VAN DIJCK HENDRIKUS ALPHONSUS LUDOVICUS, BOOM HERMAN, JANSEN ALBERT JOHANNES MARIA, HOFMANS GERARDUS CAROLUS JOHANNUS, BRULS RICHARD JOSEPH, WEHRENS MARTIJN GERARD DOMINIQ, UITTERDIJK TAMMO, CICILIA ORLANDO SERAPIO, DEMARTEAU MARCEL JOHANNES LOUIS MARIE, BAGGEN MARCEL KOENRAAD MARIE, LUIJTEN CARLO CORNELIS MARIA
Year of Publication 02.12.2004
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Year of Publication 02.12.2004
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LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHODS, MASK AND METHOD OF CHARACTERISING A MASK AND/OR PELLICLE
JANSEN, ALBERT JOHANNES MARIA, LUIJTEN, CARLO CORNELIS MARIA, WEHRENS, MARTIJN GERARD DOMINIQUE, HOFMANS, GERARDUS CAROLUS JOHANNUS, BOOM, HERMAN, BRULS, RICHARD JOSEPH, DEMARTEAU, MARCEL JOHANNES LOUIS MARIE, PONGERS, WILLEM RICHARD, VAN DIJCK, HENDRIKUS ALPHONSUS LUDOVICUS, BAGGEN, MARCEL KOENRAAD MARIE, JASPER, JOHANNES CHRISTIAAN MARIA, UITTERDIJK, TAMMO, CICILIA, ORLANDO SERAPIO
Year of Publication 03.11.2004
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Year of Publication 03.11.2004
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Lithographic apparatus, device manufacturing methods, mask and method of characterising a mask and/or pellicle
JANSEN, ALBERT JOHANNES MARIA, LUIJTEN, CARLO CORNELIS MARIA, WEHRENS, MARTIJN GERARD DOMINIQUE, HOFMANS, GERARDUS CAROLUS JOHANNUS, BOOM, HERMAN, BRULS, RICHARD JOSEPH, DEMARTEAU, MARCEL JOHANNES LOUIS MARIE, PONGERS, WILLEM RICHARD, VAN DIJCK, HENDRIKUS ALPHONSUS LUDOVICUS, BAGGEN, MARCEL KOENRAAD MARIE, JASPER, JOHANNES CHRISTIAAN MARIA, UITTERDIJK, TAMMO, CICILIA, ORLANDO SERAPIO
Year of Publication 16.02.2005
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Year of Publication 16.02.2005
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