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"CHUNG KYONG-JAE"
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"CHUNG KYONG-JAE"
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RF RF ION SOURCE WITH DYNAMIC VOLUME CONTROL PLASMA CHAMBER AND METHOD FOR ADJUSTING A VOLUME OF PLASMA
by
KOO BON WOONG
,
HWANG YONG SEOK
,
CHUNG KYONG JAE
Year of Publication
31.01.2023
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동적 체적 제어를 이용하는 ＲＦ 이온 소스
by
KOO BON WOONG
,
HWANG YONG SEOK
,
CHUNG KYONG JAE
Year of Publication
12.06.2019
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Ion source, plasma chamber, and method for adjusting a volume of plasma
by
Hwang, Yong-Seok
,
Koo, Bon-Woong
,
Chung
,
Kyong
-
Jae
Year of Publication
01.04.2024
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RF ion source with dynamic volume control
by
Hwang, Yong-Seok
,
Koo, Bon-Woong
,
Chung
,
Kyong
-
Jae
Year of Publication
20.11.2018
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RF ION SOURCE WITH DYNAMIC VOLUME CONTROL
by
Hwang, Yong-Seok
,
Koo, Bon-Woong
,
Chung
,
Kyong
-
Jae
Year of Publication
17.05.2018
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RF ION SOURCE WITH DYNAMIC VOLUME CONTROL
by
KOO, Bon-Woong
,
CHUNG
,
Kyong
-
Jae
,
HWANG, Yong-Seok
Year of Publication
11.05.2018
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RF ion source with dynamic volume control
by
Hwang Yong-Seok
,
Chung Kyong
-
Jae
,
Koo Bon-Woong
Year of Publication
20.02.2018
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RF ion source with dynamic volume control, plasma chamber, and method for adjusting a volume of plasma
by
KOO, BON-WOONG
,
CHUNG
,
KYONG
-
JAE
,
HWANG, YONG-SEOK
Year of Publication
16.06.2022
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Rf ion source with dynamic volume control, plasma chamber, and method for adjusting a volume of plasma
by
KOO, BON-WOONG
,
CHUNG
,
KYONG
-
JAE
,
HWANG, YONG-SEOK
Year of Publication
21.03.2022
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Ion source, plasma chamber and method for adjusting volume of plasma
by
KOO BON-WOONG
,
CHUNG KYONG
-
JAE
,
HWANG YONG-SEOK
Year of Publication
09.07.2021
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RF ION SOURCE WITH DYNAMIC VOLUME CONTROL
by
KOO BON-WOONG
,
CHUNG KYONG
-
JAE
,
HWANG YONG-SEOK
Year of Publication
18.06.2019
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RF ion source with dynamic volume control
by
KOO, BON-WOONG
,
CHUNG
,
KYONG
-
JAE
,
HWANG, YONG-SEOK
Year of Publication
16.05.2018
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Patent
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basic electric elements
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