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MEMS devices and methods for forming same

MEMS devices and methods for forming same

by Chu Chia-Hua, Cheng Chun-Wen
Year of Publication 28.03.2017

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Patent

SEMICONDUCTOR STRUCTURE FOR MEMS DEVICE

SEMICONDUCTOR STRUCTURE FOR MEMS DEVICE

by Peng, Jung-Huei, Liu, Yu-Chia, Cheng, Chun-Wen, Chu, Chia-Hua
Year of Publication 19.11.2020

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Patent

MEMS device structure with a capping structure

MEMS device structure with a capping structure

by Chu Chia-Hua, Cheng Chun-Wen
Year of Publication 21.02.2017

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Patent

MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE

MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE

by CHU Chia-Hua, CHENG Chun-Wen
Year of Publication 09.02.2017

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Patent

Method for fabricating MEMS switch with reduced dielectric charging effect

Method for fabricating MEMS switch with reduced dielectric charging effect

by Lin, Chung-Hsien, Cheng, Chun-Wen, Chu, Chia-Hua
Year of Publication 20.11.2018

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Patent

MEMS Pressure Sensor and Microphone Devices Having Through-Vias and Methods of Forming Same

MEMS Pressure Sensor and Microphone Devices Having Through-Vias and Methods of Forming Same

by Chu Chia-Hua, Cheng Chun-Wen
Year of Publication 05.01.2017

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Patent

Sensor integration with an outgassing barrier and a stable electrical signal path

Sensor integration with an outgassing barrier and a stable electrical signal path

by Chu Chia-Hua, Cheng Chun-Wen
Year of Publication 20.12.2016

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Patent

Effects of an after-school aerobic dance intervention on cognitive function and physical self-perception in adolescent girls

Effects of an after-school aerobic dance intervention on cognitive function and physical self-perception in adolescent girls

by 李立良(Li-Liang Li), 朱嘉華(Chia-Hua Chu), 薛慧萍(Cindy H. P. Sit), 陳柏霖(Po-Lin Chen), 潘倩玉(Chien-Yu Pan)
Published in 體育學報 (01.06.2019)

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Journal Article

Semiconductor structure for MEMS device

Semiconductor structure for MEMS device

by Peng, Jung-Huei, Liu, Yu-Chia, Cheng, Chun-Wen, Chu, Chia-Hua
Year of Publication 25.08.2020

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Patent

MEMS device with a capping substrate

MEMS device with a capping substrate

by Chu Chia-Hua, Cheng Chun-Wen
Year of Publication 06.12.2016

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Patent

Methods and apparatus for MEMS devices with increased sensitivity

Methods and apparatus for MEMS devices with increased sensitivity

by Chu Chia-Hua, Cheng Chun-Wen
Year of Publication 29.11.2016

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Patent

Semiconductor devices with moving members and methods for making the same

Semiconductor devices with moving members and methods for making the same

by Lin, Chung-Hsien, Chang, Kuei-Sung, Chu, Chia-Hua
Year of Publication 02.10.2018

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Patent

Micro-electro mechanical system (MEMS) device having a blocking layer formed between closed chamber and a dielectric layer of a CMOS substrate

Micro-electro mechanical system (MEMS) device having a blocking layer formed between closed chamber and a dielectric layer of a CMOS substrate

by Chu Chia-Hua, Cheng Chun-Wen
Year of Publication 08.11.2016

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Patent

SEMICONDUCTOR MANUFACTURING METHOD AND STRUCTURE THEREOF

SEMICONDUCTOR MANUFACTURING METHOD AND STRUCTURE THEREOF

by Lin, Shiang-Chi, Lai, Fei-Lung, Cheng, Chun-Wen, Chu, Chia-Hua
Year of Publication 23.07.2020

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Patent

Micro-electro mechanical system (MEMS) structures with through substrate vias and methods of forming the same

Micro-electro mechanical system (MEMS) structures with through substrate vias and methods of forming the same

by Chang, Kuei-Sung, Lee, Te-Hao, Chu, Chia-Hua
Year of Publication 11.09.2018

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Patent

MEMS pressure sensor and microphone devices having through-vias and methods of forming same

MEMS pressure sensor and microphone devices having through-vias and methods of forming same

by Chu Chia-Hua, Cheng Chun-Wen
Year of Publication 18.10.2016

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Patent

Method for forming biochips and biochips with non-organic landings for improved thermal budget

Method for forming biochips and biochips with non-organic landings for improved thermal budget

by Liu, Yi-Shao, Cheng, Chun-Ren, Cheng, Chun-Wen, Chang, Allen Timothy, Chu, Chia-Hua, Chang, Yi-Hsien, Chen, Ching-Ray
Year of Publication 22.03.2022

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Patent

CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME

CMOS-MEMS STRUCTURE AND METHOD OF FORMING THE SAME

by CHU, CHIA-HUA, LAI, FEI-LUNG, LIN, SHIANGI, PENG, JUNG-HUEI
Year of Publication 07.05.2020

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Patent

METHOD OF FORMING SEMICONDUCTOR DEVICE STRUCTURE

METHOD OF FORMING SEMICONDUCTOR DEVICE STRUCTURE

by Teng, Yi-Chuan, Tsai, Chun-Yin, Cheng, Chun-Wen, Chu, Chia-Hua
Year of Publication 07.05.2020

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Patent

CMOS-MEMS INTEGRATION WITH THROUGH-CHIP VIA PROCESS

CMOS-MEMS INTEGRATION WITH THROUGH-CHIP VIA PROCESS

by Mao, Wei-Jhih, Kuo, Wen Cheng, Cheng, Chun-Wen, Chu, Chia-Hua
Year of Publication 30.04.2020

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Patent

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