Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
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Published in Journal of the Electrochemical Society (01.01.2011)
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High-Mobility CVD-Grown Ge/Strained Ge0.9Sn0.1/Ge Quantum-Well pMOSFETs on Si by Optimizing Ge Cap Thickness
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Published in IEEE transactions on electron devices (01.06.2017)
Published in IEEE transactions on electron devices (01.06.2017)
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Bulk n-channel MOSFETs with buried stressor at the 28 nm process node
Clifton, Paul, Goebel, Andreas, Kessler, Matthias, Majer, Martin, Knaeblein, Karsten, Hoentschel, Jan, Hemkar, Manish, Chu, Schubert, Moffatt, Steve
Published in Solid-state electronics (01.04.2020)
Published in Solid-state electronics (01.04.2020)
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WAFER SPOT HEATING WITH BEAM WIDTH MODULATION
YE ZHIYUAN, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, NAKANISHI KOJI, NAKAGAWA TOSHIYUKI
Year of Publication 25.04.2024
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Year of Publication 25.04.2024
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Selective Epitaxial Si:P Film for nMOSFET Application: High Phosphorous Concentration and High Tensile Strain
Li, Xuebin, Dube, Abhishek, Ye, Zhiyuan, Sharma, Shashank, Kim, Yihwan, Chu, Schubert
Published in ECS transactions (12.08.2014)
Published in ECS transactions (12.08.2014)
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BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
AMOS JAMES M, NEWMAN JOHN, CHEN HUI, CONG ZHEPENG, BONHAM SHAWN JOSEPH, LUAN XINNING, CHU SCHUBERT, ERHARDT AIMEE S, AMOS PHILIP MICHAEL, FISHER KIRK ALLEN, CHEN SHAOFENG
Year of Publication 27.08.2024
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Year of Publication 27.08.2024
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EPI SELF-ALIGNED EPI CONTACT FLOW
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Year of Publication 27.09.2022
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Year of Publication 27.09.2022
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에피택시를 사용하여 형성된 적층형 픽셀 구조
BOLAND JOHN, CHU SCHUBERT S, MOFFATT STEPHEN, CHEN PAPO, SANCHEZ ERROL ANTONIO C
Year of Publication 20.09.2022
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Year of Publication 20.09.2022
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(Invited) Activation and Deactivation in Ultra-Highly Doped n-Type Epitaxy for nMOS Applications
Ye, Zhiyuan, Chen, Miao-Chun, Chang, Flora, Wu, Chen-Ying, Li, Xuebin, Dube, Abhishek, Liu, Patricia, Chopra, Saurabh, Chu, Schubert
Published in ECS transactions (08.09.2020)
Published in ECS transactions (08.09.2020)
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중첩 서셉터 및 예열 링
YE ZHIYUAN, CONG ZHEPENG, MYO NYI O, CHU SCHUBERT, SHAH KARTIK BHUPENDRA, COLLINS RICHARD O
Year of Publication 22.05.2023
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Year of Publication 22.05.2023
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Buried SiGe as a performance booster in n-channel FDSOI MOSFETs
Clifton, Paul, Goebel, Andreas, Mulfinger, Robert, Child, Amy, Straub, Sherry, Sporer, Ryan, Carter, Rick, Kluth, Jon, Schaeffer, Jamie, Nguyen, Bich-Yen, Chabanne, Guillaume, Daval, Nicolas, Schwarzenbach, Walter, Hemkar, Manish, Chu, Schubert, Moffatt, Steve
Published in Solid-state electronics (01.12.2019)
Published in Solid-state electronics (01.12.2019)
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감소된 풋프린트를 갖는 반도체 프로세싱 툴 플랫폼 구성
MERRY NIR, CHU SCHUBERT S, LEE SONGJAE, MYO NYI OO, KOSHTI SUSHANT S, KUCHAR MICHAEL C
Year of Publication 09.08.2022
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Year of Publication 09.08.2022
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평탄 실리콘 탄화물 서셉터에 대한 후면 설계
AMOS JAMES M, NEWMAN JOHN, CHEN HUI, CONG ZHEPENG, BONHAM SHAWN JOSEPH, LUAN XINNING, CHU SCHUBERT, ERHARDT AIMEE S, AMOS PHILIP MICHAEL, FISHER KIRK ALLEN, CHEN SHAOFENG
Year of Publication 08.05.2023
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Year of Publication 08.05.2023
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DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
YE ZHIYUAN, CHU SCHUBERT S, RAO PREETHAM, BAUTISTA KEVIN JOSEPH, HILKENE MARTIN A, MYO NYI O, GAJENDRA PALAMURALI, SANCHEZ ERROL ANTONIO C, COLLINS RICHARD O, HOLMGREN DOUGLAS E, SHAH KARTIK
Year of Publication 05.04.2024
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Year of Publication 05.04.2024
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