(Invited) Synthesis, Characterization, and Application of Tunable Resistance Coatings Prepared by Atomic Layer Deposition
Elam, Jeffrey W., Mane, Anil U, Libera, Joseph A., Hryn, John N., Siegmund, Oswald HW, McPhate, Jason, Wetstein, Matthew J, Elagin, Andrey, Minot, Michael J, O'Mahony, Aileen, Wagner, Robert G, Tong, William M, Brodie, Alan D., McCord, Mark A., Bevis, Christopher F.
Published in ECS transactions (01.01.2013)
Published in ECS transactions (01.01.2013)
Get full text
Journal Article
APPARATUS AND METHOD FOR DETECTING OVERLAY ERROR BY USE OF SCATTEROMETRY
MARK GINOVKER, NOAM KNOLL, JOHN FIELDEN, BORIS GOLOVANEVSKY, PAOLA DECECCO, ANATOLY FABRIKANT, ZARIKI PIOTR, MICHAEL FRIEDMAN, MOSHE BAROUCH, CHRISTOPHER F BEVIS, WHACK DANG, ADELE MICHAEL, BECKETT NOAH, IAN SMITH, MIEHER WALTER D, KENNETH P GROSS, LEWI ADY
Year of Publication 13.06.2019
Get full text
Year of Publication 13.06.2019
Patent
APPARATUS AND METHOD FOR DETECTING OVERLAY ERROR BY USE OF SCATTEROMETRY
MARK GINOVKER, NOAM KNOLL, JOHN FIELDEN, BORIS GOLOVANEVSKY, PAOLA DECECCO, ANATOLY FABRIKANT, ZARIKI PIOTR, MICHAEL FRIEDMAN, MOSHE BAROUCH, CHRISTOPHER F BEVIS, WHACK DANG, ADELE MICHAEL, BECKETT NOAH, IAN SMITH, MIEHER WALTER D, KENNETH P GROSS, LEWI ADY
Year of Publication 28.12.2017
Get full text
Year of Publication 28.12.2017
Patent
APPARATUS AND METHOD FOR DETECTING OVERLAY ERROR BY USE OF SCATTEROMETRY
MARK GINOVKER, NOAM KNOLL, JOHN FIELDEN, BORIS GOLOVANEVSKY, PAOLA DECECCO, ANATOLY FABRIKANT, ZARIKI PIOTR, MICHAEL FRIEDMAN, MOSHE BAROUCH, CHRISTOPHER F BEVIS, WHACK DANG, ADELE MICHAEL, BECKETT NOAH, IAN SMITH, MIEHER WALTER D, KENNETH P GROSS, LEWI ADY
Year of Publication 16.06.2016
Get full text
Year of Publication 16.06.2016
Patent
DEVICE AND METHOD FOR DETECTING OVERLAY ERROR USING SCATTERING MEASUREMENT
MARK GINOVKER, NOAM KNOLL, JOHN FIELDEN, BORIS GOLOVANEVSKY, PAOLA DECECCO, ANATOLY FABRIKANT, ZARIKI PIOTR, MICHAEL FRIEDMAN, MOSHE BAROUCH, CHRISTOPHER F BEVIS, WHACK DANG, ADELE MICHAEL, BECKETT NOAH, IAN SMITH, MIEHER WALTER D, KENNETH P GROSS, LEWI ADY
Year of Publication 19.03.2015
Get full text
Year of Publication 19.03.2015
Patent
Mass spectrometer detector and system and method using the same
Bevis, Christopher F, Reed, David Allen, Kadyshevitch, Alexander, Cheifetz, Eli, Liu, Yungman Alan, Weingarten, Amit
Year of Publication 21.11.2023
Get full text
Year of Publication 21.11.2023
Patent
MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME
BEVIS, Christopher F, LIU, Yungman Alan, KADYSHEVITCH, Alexander, CHEIFETZ, Eli, WEINGARTEN, Amit, REED, David Allen
Year of Publication 14.07.2022
Get full text
Year of Publication 14.07.2022
Patent
Mass spectrometer detector and system and method using the same
Bevis, Christopher F, Reed, David Allen, Kadyshevitch, Alexander, Cheifetz, Eli, Liu, Yungman Alan, Weingarten, Amit
Year of Publication 23.11.2021
Get full text
Year of Publication 23.11.2021
Patent
MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME
BEVIS, Christopher F, LIU, Yungman Alan, KADYSHEVITCH, Alexander, CHEIFETZ, Eli, WEINGARTEN, Amit, REED, David Allen
Year of Publication 02.12.2020
Get full text
Year of Publication 02.12.2020
Patent
MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME
BEVIS, Christopher F, LIU, Yungman Alan, KADYSHEVITCH, Alexander, CHEIFETZ, Eli, WEINGARTEN, Amit, REED, David Allen
Year of Publication 18.03.2020
Get full text
Year of Publication 18.03.2020
Patent
MASS SPECTROMETER DETECTOR AND SYSTEM AND METHOD USING THE SAME
BEVIS, Christopher F, LIU, Yungman Alan, KADYSHEVITCH, Alexander, CHEIFETZ, Eli, WEINGARTEN, Amit, REED, David Allen
Year of Publication 27.02.2020
Get full text
Year of Publication 27.02.2020
Patent