Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool
SHINAGAWA ROBERT, LEHMAN KURT, TRIKAS THANASSIS, ALLEN RONALD L, BEVIS CHRISTOPHER F, CHEN CHARLES, CHEN HAIGUANG, SETHURAMAN ANANTHA, MENG CHING LING
Year of Publication 09.09.2014
Get full text
Year of Publication 09.09.2014
Patent
METHODS AND SYSTEMS FOR CONTROLLING VARIATION IN DIMENSIONS OF PATTERNED FEATURES ACROSS A WAFER
FIELDEN JOHN, LEVY ADY, BEVIS CHRISTOPHER F, HANNA MICHAEL, WAGNER LARRY, WACK DAN
Year of Publication 04.11.2010
Get full text
Year of Publication 04.11.2010
Patent
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
MARK GINOVKER, NOAM KNOLL, JOHN FIELDEN, BORIS GOLOVANEVSKY, PAOLA DECECCO, ANATOLY FABRIKANT, ZARIKI PIOTR, MICHAEL FRIEDMAN, MOSHE BAROUCH, CHRISTOPHER F BEVIS, WHACK DANG, ADELE MICHAEL, BECKETT NOAH, IAN SMITH, MIEHER WALTER D, KENNETH P GROSS, LEWI ADY
Year of Publication 06.03.2014
Get full text
Year of Publication 06.03.2014
Patent
Systems and Methods for Determining One or More Characteristics of a Specimen Using Radiation in the Terahertz Range
FIELDEN JOHN, LEVY ADY, MIEHER WALTER, BEVIS CHRISTOPHER F, CONCINA STEFANO, NGAI SAMUEL, MUELLER DIETER, RICHARDSON NEIL, WAGNER LARRY, WACK DAN
Year of Publication 08.11.2012
Get full text
Year of Publication 08.11.2012
Patent