Lithographic apparatus and device manufacturing method
Liebregts, Paulus Martinus Maria, Van Lierop, Mathieus Anna Karel, Mondt, Eva, Miranda, Marcio Alexandre Cano, Lempens, Han Henricus Aldegonda, Verstraete, Joris Johan Anne-Marie, Simons, Wilhelmus Franciscus Johannes, Spruytenburg, Patrick Johannes Wilhelmus, Hoogendam, Christiaan Alexander, Direcks, Daniël Jozef Maria, Riepen, Michel, Berkvens, Paul Petrus Joannes, Janssen, Franciscus Johannes Joseph, Van Der Ham, Ronald, Brands, Gert-Jan Gerardus Johannes Thomas, Steffens, Koen, De Metsenaere, Christophe
Year of Publication 23.04.2019
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Year of Publication 23.04.2019
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Lithographic apparatus and device manufacturing method
Lempens Han Henricus Aldegonda, Direcks Daniël Jozef Maria, Liebregts Paulus Martinus Maria, Mondt Eva, Janssen Franciscus Johannes Joseph, Steffens Koen, Spruytenburg Patrick Johannes Wilhelmus, Verstraete Joris Johan Anne-Marie, Van Der Ham Ronald, Van Lierop Mathieus Anna Karel, Miranda Marcio Alexandre Cano, Hoogendam Christiaan Alexander, De Metsenaere Christophe, Berkvens Paul Petrus Joannes, Riepen Michel, Brands Gert-Jan Gerardus Johannes Thomas, Simons Wilhelmus Franciscus Johannes
Year of Publication 09.05.2017
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Year of Publication 09.05.2017
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FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
ROPS CORNELIUS MARIA, RIEPEN MICHAEL, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, BERKVENS PAUL PETRUS JOANNES, METSENAERE CHRISTOPHE DE, VERMAELEN MARKUS MARTINUS PETRUS ADRIANUS, KEMPER NICOLAAS R, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 16.08.2012
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Year of Publication 16.08.2012
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FLUID EXTRACT SYSTEM, LITHOGRAPHY APPARATUS, AND DEVICE MANUFACTURING METHOD
ROPS CORNELIUS MARIA, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, METSENAERE CHRISTOPHE DE, VERMAELEN MARKUS MARTINUS PETRUS ADRIANUS, KEMPER NICOLAAS R, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 24.06.2010
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Year of Publication 24.06.2010
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LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICE
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, JANSSEN FRANCISCUS JOHANNES JOSEPH, DE GRAAF ROELOF FREDERIK, SIMONS WILHELMUS FRANCISCUS JOHANNES, DIREKS DANIEL JOSEPH MARIA, MIRANDA MARCIO ALEXANDRE CANO, BERKVENS PAUL PETRUS JOANNES, BRANDS GERT-JAN GERARDUS JOHANEES THOMAS, LIEROP MATHIEUS ANNA KAREL VAN, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, VERSTRAETE JORIS JOHAN ANNE-MARIE, METSENAERE CHRISTOPHE DE, LEMPENS HAN HENRICUS ALDEGONDA, VAN DER HAM RONALD, SCHOLTES PAUL WILLIAM
Year of Publication 01.09.2011
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Year of Publication 01.09.2011
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FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, JACOBS JOHANNES HENRICUS WILHELMUS, JANSSEN FRANCISCUS JOHANNES JOSEPH, SIMONS WILHELMUS FRANCISCUS JOHANNES, DIREKS DANIEL JOSEPH MARIA, BLOKS RUUD HENDRICUS MARTINUS JOHANNES, MIRANDA MARCIO ALEXANDRE CANO, BERKVENS PAUL PETRUS JOANNES, BRANDS GERT-JAN GERARDUS JOHANEES THOMAS, LIEROP MATHIEUS ANNA KAREL VAN, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, VERSTRAETE JORIS JOHAN ANNE-MARIE, METSENAERE CHRISTOPHE DE, PATEL HRISHIKESH, LEMPENS HAN HENRICUS ALDEGONDA, VAN DER HAM RONALD
Year of Publication 20.01.2011
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Year of Publication 20.01.2011
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Lithographic apparatus and device manufacturing method
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, HAM RONALD VAN DER, VERSTRAETE JORIS JOHAN, SPRUYTENBURG PATRICK JOHANNES, JANSSEN FRANCISCUS JOHANNES JOSEPH, DE GRAAF ROELOF FREDERIK, SIMONS WILHELMUS FRANCISCUS, MIRANDA MARCIO ALEXANDRE CANO, BERKVENS PAUL PETRUS JOANNES, DIRECKS DANIEL JOZEF MARIA, LIEROP MATHIEUS ANNA KAREL VAN, METSENAERE CHRISTOPHE DE, SCHOLTES-VAN EIJK PAUL WILLIAM, BRANDS GERT-JAN GERARDUS, LEMPENS HAN HENRICUS ALDEGONDA
Year of Publication 19.03.2009
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Year of Publication 19.03.2009
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Lithographic apparatus and device manufacturing method
LIEBREGTS PAULUS MARTINUS MARIA, MONDT EVA, STEFFENS KOEN, HAM RONALD VAN DER, BRANDS GERT-JAN GERARDUS JOHANNES THOMAS, HOOGENDAM CHRISTIAAN ALEXANDER, SIMONS WILHELMUS FRANCISCUS JOHANNES, MIRANDA MARCIO ALEXANDRE CANO, DIRECKS DANIEL JOSEF MARIA, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, LIEROP MATHIEUS ANNA KAREL VAN, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, VERSTRAETE JORIS JOHAN ANNE-MARIE, METSENAERE CHRISTOPHE DE, LEMPENS HAN HENRICUS ALDEGONDA
Year of Publication 04.09.2008
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Year of Publication 04.09.2008
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, JANSSEN FRANCISCUS JOHANNES JOSEPH, DE GRAAF ROELOF FREDERIK, SIMONS WILHELMUS FRANCISCUS JOHANNES, DIREKS DANIEL JOSEPH MARIA, MIRANDA MARCIO ALEXANDRE CANO, BERKVENS PAUL PETRUS JOANNES, BRANDS GERT-JAN GERARDUS JOHANEES THOMAS, LIEROP MATHIEUS ANNA KAREL VAN, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, VERSTRAETE JORIS JOHAN ANNE-MARIE, METSENAERE CHRISTOPHE DE, LEMPENS HAN HENRICUS ALDEGONDA, VAN DER HAM RONALD, SCHOLTES PAUL WILLIAM
Year of Publication 21.05.2009
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Year of Publication 21.05.2009
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Lithographic apparatus and device manufacturing method
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, HAM RONALD VAN DER, BRANDS GERT-JAN GERARDUS JOHANNES THOMAS, JANSSEN FRANCISCUS JOHANNES JOSEPH, SIMONS WILHELMUS FRANCISCUS JOHANNES, MIRANDA MARCIO ALEXANDRE CANO, BERKVENS PAUL PETRUS JOANNES, DIRECKS DANIEL JOZEF MARIA, LIEROP MATHIEUS ANNA KAREL VAN, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, VERSTRAETE JORIS JOHAN ANNE-MARIE, METSENAERE CHRISTOPHE DE, GRAAF ROELOF FREDERIK DE, LEMPENS HAN HENRICUS ALDEGONDA, SCHOLTES PAUL WILLIAM
Year of Publication 13.04.2011
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Year of Publication 13.04.2011
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LIEBREGTS Paulus Martinus Maria, DIRECKS Daniël Jozef Maria, VERSTRAETE Joris Johan Anne-Marie, VAN LIEROP Mathieus Anna Karel, MIRANDA Marcio Alexandre Cano, HOOGENDAM Christiaan Alexander, SPRUYTENBURG Patrick Johannes Wilhelmus, BERKVENS Paul Petrus Joannes, RIEPEN Michel, MONDT Eva, DE METSENAERE Christophe, VAN DER HAM Ronald, STEFFENS Koen, LEMPENS Han Henricus Aldegonda, JANSSEN Franciscus Johannes Joseph, BRANDS Gert-Jan Gerardus Johannes Thomas, SIMONS Wilhelmus Franciscus Johannes
Year of Publication 24.08.2017
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Year of Publication 24.08.2017
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Fluid extraction system, lithographic apparatus and device manufacturing method
DE METSENAERE CHRISTOPHE, ROPS CORNELIUS MARIA, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, KEMPER NICOLAAS RUDOLF, VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 15.12.2015
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Year of Publication 15.12.2015
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Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing method
DE METSENAERE CHRISTOPHE, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, CORCORAN GREGORY MARTIN MASON, BERKVENS PAUL PETRUS JOANNES, SCHNEIDERS MAURITIUS GERARDUS ELISABETH, KUNST RONALD CASPER
Year of Publication 22.07.2014
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Year of Publication 22.07.2014
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FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
DE METSENAERE CHRISTOPHE, ROPS CORNELIUS MARIA, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, KEMPER NICOLAAS RUDOLF, VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 09.10.2014
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Year of Publication 09.10.2014
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Fluid extraction system, lithographic apparatus and device manufacturing method
DE METSENAERE CHRISTOPHE, ROPS CORNELIUS MARIA, VAN BALLEGOIJ ROBERTUS NICODEMUS JACOBUS, VAN DE WINKEL JIMMY MATHEUS WILHELMUS, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, KEMPER NICOLAAS RUDOLF, VERMEULEN MARCUS MARTINUS PETRUS ADRIANUS, VAN DEN HEUVEL MARTINUS WILHELMUS
Year of Publication 18.02.2014
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Year of Publication 18.02.2014
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LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
LIEBREGTS PAULUS MARTINUS MARIA, MONDT EVA, STEFFENS KOEN, BRANDS GERT-JAN GERARDUS JOHANNES THOMAS, HOOGENDAM CHRISTIAAN ALEXANDER, DIRECKS DANIËL JOZEF MARIA, SIMONS WILHELMUS FRANCISCUS JOHANNES, DE METSENAERE CHRISTOPHE, MIRANDA MARCIO ALEXANDRE CANO, VAN LIEROP MATHIEUS ANNA KAREL, RIEPEN MICHEL, BERKVENS PAUL PETRUS JOANNES, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, VERSTRAETE JORIS JOHAN ANNE-MARIE, LEMPENS HAN HENRICUS ALDEGONDA, VAN DER HAM RONALD
Year of Publication 10.04.2014
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Year of Publication 10.04.2014
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Lithographic apparatus and device manufacturing method
LIEBREGTS PAULUS MARTINUS MARIA, MONDT EVA, STEFFENS KOEN, BRANDS GERT-JAN GERARDUS JOHANNES THOMAS, HOOGENDAM CHRISTIAAN ALEXANDER, SIMONS WILHELMUS FRANCISCUS JOHANNES, DE METSENAERE CHRISTOPHE, MIRANDA MARCIO ALEXANDRE CANO, VAN LIEROP MATHIEUS ANNA KAREL, RIEPEN MICHEL, DIRECKS DANIEL JOZEF MARIA, BERKVENS PAUL PETRUS JOANNES, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, VERSTRAETE JORIS JOHAN ANNE-MARIE, LEMPENS HAN HENRICUS ALDEGONDA, VAN DER HAM RONALD
Year of Publication 21.01.2014
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Year of Publication 21.01.2014
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Lithographic apparatus and device manufacturing method
LIEBREGTS PAULUS MARTINUS MARIA, STEFFENS KOEN, BRANDS GERT-JAN GERARDUS JOHANNES THOMAS, JANSSEN FRANCISCUS JOHANNES JOSEPH, DE GRAAF ROELOF FREDERIK, SIMONS WILHELMUS FRANCISCUS JOHANNES, DE METSENAERE CHRISTOPHE, MIRANDA MARCIO ALEXANDRE CANO, VAN LIEROP MATHIEUS ANNA KAREL, BERKVENS PAUL PETRUS JOANNES, DIRECKS DANIEL JOZEF MARIA, SPRUYTENBURG PATRICK JOHANNES WILHELMUS, VERSTRAETE JORIS JOHAN ANNE-MARIE, SCHOLTES-VAN EIJK PAUL WILLIAM, LEMPENS HAN HENRICUS ALDEGONDA, VAN DER HAM RONALD
Year of Publication 25.03.2014
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Year of Publication 25.03.2014
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