Vertical etching of Al0.7Sc0.3N for next generation of acoustic wave resonators
Terzic, Tamara, Andrianov, Nikolai, Chouiki, Mustapha, Solonenko, Dmytro, De Pastina, Annalisa, Pashchenko, Vladimir, Risquez, Sarah
Published in 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) (28.05.2023)
Published in 2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) (28.05.2023)
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