LSMO thin films with high metal-insulator transition temperature on buffered SOI substrates for uncooled microbolometers
CHROMIK, Š, STRBIK, V, CHOLEVA, P, DOBROCKA, E, ROCH, T, ROSOVA, A, SPANKOVA, M, LALINSKY, T, VANKO, G, LOBOTKA, P, RALBOVSKY, M
Published in Applied surface science (01.09.2014)
Published in Applied surface science (01.09.2014)
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Journal Article
Stress investigation of the AlGaN/GaN micromachined circular diaphragms of a pressure sensor
Dzuba, J, Vanko, G, Dr ík, M, Rýger, I, Vallo, M, Kutiš, V, Haško, D, Choleva, P, Lalinský, T
Published in Journal of micromechanics and microengineering (01.01.2015)
Published in Journal of micromechanics and microengineering (01.01.2015)
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Journal Article
Micromachined membrane structures for pressure sensors based on AlGaN/GaN circular HEMT sensing device
Lalinský, T., Hudek, P., Vanko, G., Dzuba, J., Kutiš, V., Srnánek, R., Choleva, P., Vallo, M., Držík, M., Matay, L., Kostič, I.
Published in Microelectronic engineering (01.10.2012)
Published in Microelectronic engineering (01.10.2012)
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Bulk micromachining of SiC substrate for MEMS sensor applications
Vanko, Gabriel, Hudek, Peter, Zehetner, Johann, Dzuba, Jaroslav, Choleva, Pavlina, Kutiš, Vladimír, Vallo, Martin, Rýger, Ivan, Lalinský, Tibor
Published in Microelectronic engineering (01.10.2013)
Published in Microelectronic engineering (01.10.2013)
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Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions
Zehetner, J., Vanko, G., Choleva, P., Dzuba, J., Ryger, I., Lalinsky, T.
Published in The Tenth International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2014)
Published in The Tenth International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2014)
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Conference Proceeding
Laser ablation: A supporting technique to micromachining of SiC
Vanko, G., Zehetner, J., Choleva, P., Lalinsky, T., Hudek, P.
Published in The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems (01.11.2012)
Published in The Ninth International Conference on Advanced Semiconductor Devices and Mircosystems (01.11.2012)
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Conference Proceeding
AlGaN/GaN micromembranes with diamond coating for high electron mobility transistors operated at high temperatures
Vanko, G., Vojs, M., Izak, T., Potocky, S., Choleva, P., Marton, M., Ryger, I., Dzuba, J., Lalinsky, T.
Published in The Tenth International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2014)
Published in The Tenth International Conference on Advanced Semiconductor Devices and Microsystems (01.10.2014)
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Micro structuring of photoresist with femtosecond laser pulses
Zoppel, S., Partel, S., Choleva, P., Hudek, P., Huber, H., Lederer, M., der Au, J. Aus, Reider, G.A.
Published in 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (01.06.2007)
Published in 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (01.06.2007)
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