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"CHOI SUK LYONG"
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Substrate processing apparatus temperature control method and substrate processing method using the substrate processing apparatus
by
CHOI JIN YOUNG
,
CHOI SUK LYONG
,
PARK SEONG JIN
Year of Publication
14.12.2023
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Substrate processing method
by
PARK SANG UK
,
CHOI SUK LYONG
,
KIM JIN HO
,
YUN CHANG HOON
Year of Publication
04.03.2024
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SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE OCONTROL METHOD
by
PARK SANG UK
,
LEE CHAN WOO
,
NOH JIN TAE
,
CHOI SUK LYONG
Year of Publication
07.06.2023
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Patent
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chemistry
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medicine
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sciences
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chemical surface treatment
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chemistry
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coating material with metallic material
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coating metallic material
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diffusion treatment of metallic material
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inhibiting corrosion of metallic material or incrustation ingeneral
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Korean
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esp@cenet
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