(Invited) The Past, Present and Future of High-k/Metal Gates
Choi, Kisik, Ando, Takashi, Cartier, Eduard A., Kerber, Andreas, Paruchuri, Vamsi, Iacoponi, John, Narayanan, Vijay
Published in ECS transactions (03.05.2013)
Published in ECS transactions (03.05.2013)
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Journal Article
Bias temperature instability in High-κ/metal gate transistors - Gate stack scaling trends
Krishnan, S., Narayanan, V., Cartier, E., Ioannou, D., Kai Zhao, Ando, T., Unoh Kwon, Linder, B., Stathis, J., Chudzik, M., Kerber, A., Kisik Choi
Published in 2012 IEEE International Reliability Physics Symposium (IRPS) (01.04.2012)
Published in 2012 IEEE International Reliability Physics Symposium (IRPS) (01.04.2012)
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Conference Proceeding
Comparison of effective work function extraction methods using capacitance and current measurement techniques
Huang-Chun Wen, Rino Choi, Brown, G.A., BosckeBoscke, T., Matthews, K., Harris, H.R., Kisik Choi, Alshareef, H.N., Hongfa Luan, Bersuker, G., Majhi, P., Dim-Lee Kwong, Byoung Hun Lee
Published in IEEE electron device letters (01.07.2006)
Published in IEEE electron device letters (01.07.2006)
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Journal Article
On Oxygen Deficiency and Fast Transient Charge-Trapping Effects in High- k Dielectrics
Huang-Chun Wen, Harris, H.R., Young, C.D., Hongfa Luan, Alshareef, H.N., Kisik Choi, Dim-Lee Kwong, Majhi, P., Bersuker, G., Byoung Hun Lee
Published in IEEE electron device letters (01.12.2006)
Published in IEEE electron device letters (01.12.2006)
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Journal Article
Spin-dependent electron scattering in cobalt interconnects
Lanzillo, Nicholas A, Bhosale, Prasad, Lavoie, Christian, Dechene, Daniel J, Robison, Robert R, Choi, Kisik
Published in Journal of physics. D, Applied physics (04.12.2019)
Published in Journal of physics. D, Applied physics (04.12.2019)
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Journal Article
Impact of Bottom Interfacial Layer on the Threshold Voltage and Device Reliability of Fluorine Incorporated PMOSFETS with High-K/Metal Gate
Kisik Choi, Taeho Lee, Barnett, J., Harris, H.R., Seungsoo Kweon, Young, C., Bersuker, G., Choi, R., Seung Chul Song, Byoung Hun Lee, Jammy, R.
Published in 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual (01.04.2007)
Published in 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual (01.04.2007)
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Conference Proceeding
SEMICONDUCTOR STRUCTURE, SEMICONDUCTOR ARRAY STRUCTURE, SEMICONDUCTOR ARRAY STRUCTURE FORMING METHOD, AND HARDWARE DESCRIPTION LANGUAGE (HDL) DESIGN STRUCTURE (TWO-DIMENSIONAL SELF-ALIGNED BACKSIDE VIA-TO-BACKSIDE POWER RAIL (VBPR))
BRENT A ANDERSON, JOHN CHRISTOPHER ARNOLD, CHOI KISIK, XIE RUILONG, LAWRENCE A CLEVENGER
Year of Publication 12.07.2023
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Year of Publication 12.07.2023
Patent
자기-정렬된 상단 비아
YANG CHIH CHAO, PARK CHANRO, CHENG KENNETH CHUN KUEN, CHOI KISIK, MOTOYAMA KOICHI
Year of Publication 03.07.2023
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Year of Publication 03.07.2023
Patent
SEMICONDUCTOR DEVICE AND METHOD (BURIED POWER RAIL IN TIGHT CELL-TO-CELL SPACE)
KEVIN SHAWN PETRARCA, CHOI KISIK, STUART SIEG, SOMNATH GHOSH, XIE RUILONG
Year of Publication 20.06.2023
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Year of Publication 20.06.2023
Patent
SEMICONDUCTOR STRUCTURES AND METHODS (BURIED POWER RAIL AFTER REPLACEMENT METAL GATE)
SAGARIKA MUKESH, CHOI KISIK, DEVIKA SARKAR GRANT, SOMNATH GHOSH, XIE RUILONG
Year of Publication 01.06.2023
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Year of Publication 01.06.2023
Patent
SEMICONDUCTOR STRUCTURE AND METHOD (ALTERNATIVE EMBEDDED POWER RAIL)
KEVIN SHAWN PETRARCA, CHOI KISIK, STUART SIEG, SOMNATH GHOSH, XIE RUILONG
Year of Publication 26.05.2023
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Year of Publication 26.05.2023
Patent
METHODS OF FORMING INTEGRATED CHIPS, AND INTEGRATED CHIPS (BACKSIDE POWER RAILS)
CHOI KISIK, STUART SIEG, ALEXANDER REZNICEK, SOMNATH GHOSH, RISHIKESH KRISHNAN, XIE RUILONG
Year of Publication 10.04.2023
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Year of Publication 10.04.2023
Patent
Gate-first high-k/metal gate DRAM technology for low power and high performance products
Sung, Minchul, Jang, Se-Aug, Lee, Hyunjin, Ji, Yun-Hyuck, Kang, Jae-Il, Jung, Tae-O, Ahn, Tae-Hang, Son, Yun-Ik, Kim, Hyung-Chul, Lee, Sun-Woo, Lee, Seung-Mi, Lee, Jung-Hak, Baek, Seung-Beom, Doh, Eun-Hyup, Cho, Heung-Jae, Jang, Tae-Young, Jang, Il-Sik, Han, Jae-Hwan, Ko, Kyung-Bo, Lee, Yu-Jun, Shin, Su-Bum, Yu, Jae-Seon, Cho, Sung-Hyuk, Han, Ji-Hye, Kang, Dong-Kyun, Kim, Jinsung, Lee, Jae-Sang, Ban, Keun-Do, Yeom, Seung-Jin, Nam, Hyun-Wook, Lee, Dong-Kyu, Jeong, Mun-Mo, Kwak, Byungil, Park, Jeongsoo, Choi, Kisik, Park, Sung-Kye, Kwak, Noh-Jung, Hong, Sung-Joo
Published in 2015 IEEE International Electron Devices Meeting (IEDM) (01.12.2015)
Published in 2015 IEEE International Electron Devices Meeting (IEDM) (01.12.2015)
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Conference Proceeding
Journal Article
BEOL Compatible High-Capacitance MIMCAP Structure Using a Novel High k Material
Jamison, Paul C., Massey, John, Ando, Takashi, Cartier, Eduard A., Jagannathan, Hemanth, Chen, P. J., Liu, Eric, Romero, Alex, Naczas, Sebastian, Narayanan, Vijay, Pancharatnam, Shanti, Restle, Phillip, Rubin, Joshua, Loubet, Nicolas J, Choi, Kisik
Published in ECS transactions (24.04.2020)
Published in ECS transactions (24.04.2020)
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Journal Article
DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE (BACKSIDE POWER RAILS AND POWER DISTRIBUTION NETWORK FOR DENSITY SCALING)
SAGARIKA MUKESH, ALBERT CHU, GUO DECHAO, JOHN CHRISTOPHER ARNOLD, BRENT A ANDERSON, ALBERT M YOUNG, CHOI KISIK, BU HUIMING, KAI ZHAO, SOMNATH GHOSH, XIE RUILONG, BALASUBRAMANIAN S PRANATHARTHIHARAN
Year of Publication 07.07.2023
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Year of Publication 07.07.2023
Patent
Backside Power Distribution for Nanosheet Technologies Beyond 2nm
Xie, Ruilong, Hong, Wonhyuk, Zhang, Chen, Lee, Jongjin, Brew, Kevin, Johnson, Richard, Lanzillo, Nicholas, Shobha, Hosadurga, Kim, Taesun, Park, Panjae, Mochizuki, Shogo, Saraf, Iqbal, Park, Chanro, Zhuang, Lei, Osborn, Clifford, Li, Wai Kin, Liu, Feng, Sankarapandian, Muthumanickam, Yang, Chung Ju, Li, Juntao, Tierney, Lukas, Pujari, Ruturaj, Sulehria, Yasir, Song, Yuncheng, Zhou, Huimei, Wang, Miaomiao, Belyansky, Michael, Ghosh, Somnath, Zhang, Haojun, Motoyama, Koichi, Sarkar, Debarghya, Kim, Wukang, Chu, Albert, Li, Tao, Carta, Fabio, Gluschenkov, Oleg, Oh, Joongsuk, Malley, Matthew, Chu, Pinlei, Nguyen, Son, Luedders, Katherine, Lee, Joe, Khan, Shahrukh, Chowdhury, Prabudhya Roy, Huang, Huai, Shadman, Abir, Sieg, Stuart, Dechene, Daniel, Edelstein, Daniel, Arnold, John, Yamashita, Tenko, Choi, Kisik, Seo, Kang-ill, Guo, Dechao, Bu, Huiming
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
Published in 2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (16.06.2024)
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Conference Proceeding
Self-Allancd Gate Contact (SAGC) for CMOS technology scaling beyond 7nm
Xie, Ruilong, Park, Chanro, Conti, Richard, Robison, Robert, Zhou, Huimei, Saraf, Iqbal, Carr, Adra, Fan, Susan Su Chen, Ryan, Kevin, Belyansky, Michael, Pancharatnam, Shanti, Young, Albert, Wang, Junli, Greene, Andrew, Cheng, Kangguo, Li, Juntao, Conte, Richard, Tang, Hao, Choi, Kisik, Amanapu, Hari, Peethala, Brown, Muthinti, Raja, Raymond, Mark, Prindle, Christopher, Liang, Yong, Tsai, Stan, Kamineni, Vimal, Labonte, Andre, Cave, Nigel, Gupta, Dinesh, Basker, Veeraraghavan, Loubet, Nicolas, Guo, Dechao, Haran, Bala, Knorr, Andreas, Bu, Huiming
Published in 2019 Symposium on VLSI Technology (01.06.2019)
Published in 2019 Symposium on VLSI Technology (01.06.2019)
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Conference Proceeding
Decoupling the Fermi-level pinning effect and intrinsic limitations on p-type effective work function metal electrodes
Wen, Huang-Chun, Majhi, Prashant, Choi, Kisik, Park, C.S., Alshareef, Husam N., Rusty Harris, H., Luan, Hongfa, Niimi, Hiro, Park, Hong-Bae, Bersuker, Gennadi, Lysaght, Patrick S., Kwong, Dim-Lee, Song, S.C., Lee, Byoung Hun, Jammy, Raj
Published in Microelectronic engineering (2008)
Published in Microelectronic engineering (2008)
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Journal Article