Structure for preventing gap formation and plasma processing equipment having the same
Park, Eui-Jin, Choi, Yun-Ho, Park, In-Young, Jeong, Hwan-Il, Choi, Sung-Sok
Year of Publication 01.06.2010
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Year of Publication 01.06.2010
Patent
Structure for preventing gap formation and plasma processing equipment having the same
PARK IN-YOUNG, PARK EUI-JIN, JEONG HWAN-IL, CHOI SUNG-SOK, CHOI YUN-HO
Year of Publication 01.06.2010
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Year of Publication 01.06.2010
Patent
STRUCTURE FOR PREVENTING GAP FORMATION AND PLASMA PROCESSING EQUIPMENT HAVING THE SAME
PARK IN-YOUNG, PARK EUI-JIN, JEONG HWAN-IL, CHOI SUNG-SOK, CHOI YUN-HO
Year of Publication 19.02.2009
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Year of Publication 19.02.2009
Patent
Gap formation prevention structure for use in wafer processing unit, has holder for holding wafer and gap prevention unit with ring, which is positioned on outer side of holder
PARK, IN-YOUNG, CHOI, SUNG-SOK, PARK, EUI-JIN, CHOI, YUN-HO, JEONG, HWAN-IL
Year of Publication 28.08.2008
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Year of Publication 28.08.2008
Patent
GAP OCCURRENCE PREVENTION STRUCTURE AND PLASMA PROCESSING APPARATUS HAVING THE SAME
PARK IN-YOUNG, PARK EUI-JIN, JEONG HWAN-IL, CHOI SUNG-SOK, CHOI YUN-HO
Year of Publication 24.07.2008
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Year of Publication 24.07.2008
Patent
STRUCTURE FOR PROTECTING GAP FORMATION AND PLASMA PROCESSING EQUIPMENT HAVING THE SAME
CHOI, YUN HO, CHOI, SUNG SOK, PARK, EUI JIN, PARK, IN YOUNG, JEONG, HWAN IL
Year of Publication 15.07.2008
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Year of Publication 15.07.2008
Patent