HARDMASK COMPOSITION HARDMASK LAYER AND METHOD OF FORMING PATTERNS
YOO YONGSIK, YANG SUNYOUNG, PARK YUSHIN, LEE HYUNSOO, KIM SUNGHWAN, CHOE HUISEON
Year of Publication 22.07.2024
Get full text
Year of Publication 22.07.2024
Patent
HARDMASK COMPOSITION AND METHOD OF FORMING PATTERNS
KIM SEUNGHYUN, PARK SANGCHOL, SHIN SEUNG WOOK, CHOE HUISEON, KIM SANGMI, WON DONGHOON
Year of Publication 04.10.2023
Get full text
Year of Publication 04.10.2023
Patent
HARDMASK COMPOSITION HARDMASK LAYER AND METHOD OF FORMING PATTERNS
YOO YONGSIK, KIM SEUNGHYUN, PARK SANGCHOL, SHIN SEUNG WOOK, CHOI SEIL, CHOE HUISEON, WON DONGHOON, KIM SANGMI
Year of Publication 19.08.2024
Get full text
Year of Publication 19.08.2024
Patent
HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS
KIM SEUNG-HYUN, PARK SANGCHOL, PARK YUSHIN, CHOI SEIL, SHIN SEUNG-WOOK, CHOE HUISEON, KIM SANGMI
Year of Publication 24.07.2023
Get full text
Year of Publication 24.07.2023
Patent
HARDMASK COMPOSITION HARDMASK LAYER AND METHOD OF FORMING PATTERNS
KIM SEUNGHYUN, PARK SANGCHOL, SHIN SEUNG WOOK, PARK YUSHIN, CHOI SEIL, CHOE HUISEON, KIM SANGMI
Year of Publication 18.07.2023
Get full text
Year of Publication 18.07.2023
Patent
HARDMASK COMPOSITION HARDMASK LAYER AND METHOD OF FORMING PATTERNS
KIM SEUNGHYUN, PARK SANGCHOL, SHIN SEUNG WOOK, JEONG SEULGI, SO MINJI, CHUNG JOOYOUNG, CHOE HUISEON, NAM YOUNHEE, KIM SANGMI
Year of Publication 30.09.2024
Get full text
Year of Publication 30.09.2024
Patent
HARDMASK COMPOSITION HARDMASK LAYER AND METHOD OF FORMING PATTERNS
YOO YONGSIK, YANG SUNYOUNG, PARK YUSHIN, LEE HYUNSOO, CHOI SEIL, CHOE HUISEON, WON DONGHOON
Year of Publication 01.07.2022
Get full text
Year of Publication 01.07.2022
Patent
HARDMASK COMPOSITION AND METHOD OF FORMING PATTERNS
YOO YONGSIK, YANG SUNYOUNG, PARK YUSHIN, LEE HYUNSOO, KIM SUNGHWAN, CHOE HUISEON
Year of Publication 11.02.2022
Get full text
Year of Publication 11.02.2022
Patent
HARDMASK COMPOSITION AND METHOD OF FORMING PATTERNS
YOO YONGSIK, YANG SUNYOUNG, PARK YUSHIN, LEE HYUNSOO, LIM SANGHAK, KIM SUNGHWAN, CHOE HUISEON
Year of Publication 23.09.2021
Get full text
Year of Publication 23.09.2021
Patent
HARDMASK COMPOSITION AND METHOD OF FORMING PATTERNS
YOO YONGSIK, YANG SUNYOUNG, PARK YUSHIN, LEE HYUNSOO, KIM SUNGHWAN, CHOE HUISEON
Year of Publication 17.09.2021
Get full text
Year of Publication 17.09.2021
Patent
HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS
SHIN, Seung-Wook, KIM, Sangmi, CHOI, Seil, CHOE, Huiseon, PARK, Sangchol, KIM, Seunghyun, PARK, Yushin
Year of Publication 13.07.2023
Get full text
Year of Publication 13.07.2023
Patent