원하는 제타 전위를 가진 연마 제품을 형성하는 장치 및 방법
CHOCKALINGAM ASHWIN, FU BOYI, BAJAJ RAJEEV, ORILALL MAHENDRA C, REDFIELD DANIEL, YAMAMURA MAYU
Year of Publication 11.06.2018
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Year of Publication 11.06.2018
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윈도우를 갖는 연마 패드 및 그의 제조 방법들
CORNEJO MARIO DAGIO, FU BOYI, GANAPATHIAPPAN SIVAPACKIA, CHOCKALINGAM ASHWIN, PATIBANDLA NAG B, BAJAJ RAJEEV, BENVEGNU DOMINIC J, REDFIELD DANIEL, VORA ANKIT, YAMAMURA MAYU
Year of Publication 16.03.2020
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Year of Publication 16.03.2020
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패드 구조 및 제조 방법들
CORNEJO MARIO, CHOCKALINGAM ASHWIN, PATIBANDLA NAG B, BAJAJ RAJEEV, NG HOU T, REDFIELD DANIEL, YAMAMURA MAYU
Year of Publication 22.10.2018
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Year of Publication 22.10.2018
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통합된 연마재 연마 패드들 및 제조 방법들
CORNEJO MARIO DAGIO, ARNEPALLI RANGA RAO, CHOCKALINGAM ASHWIN, GANAPATHIAPPAN SIVAPACKIA, FU BOYI, PATIBANDLA NAG B, BAJAJ RAJEEV, SINHA AMRITANSHU, REDFIELD DANIEL, ZHAO YAN, KUMAR ASHAVANI, REDEKER FRED C
Year of Publication 04.03.2020
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Year of Publication 04.03.2020
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화학적 기계적 연마를 위한 조직화된 소형 패드
OH JEONGHOON, CHOCKALINGAM ASHWIN MURUGAPPAN, SUAREZ EDWIN C, FUNG JASON GARCHEUNG, REDFIELD DANIEL, OSTERHELD THOMAS H, HEUNG KING YI, GARRETSON CHARLES C, LAU ERIC
Year of Publication 02.11.2018
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Year of Publication 02.11.2018
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다공성 화학적 기계적 연마 패드들
GANAPATHIAPPAN SIVAPACKIA, FU BOYI, CHOCKALINGAM ASHWIN, PATIBANDLA NAG B, BAJAJ RAJEEV, ORILALL MAHENDRA C, REDFIELD DANIEL, YAMAMURA MAYU, REDEKER FRED C
Year of Publication 31.08.2018
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Year of Publication 31.08.2018
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적층 제조 프로세스를 이용하여 진보된 연마 패드를 형성하기 위한 방법 및 장치
GANAPATHIAPPAN SIVAPACKIA, FU BOYI, CHOCKALINGAM ASHWIN, BAJAJ RAJEEV, ORILALL MAHENDRA C, REDFIELD DANIEL, NG HOU T, FUNG JASON G, YAMAMURA MAYU
Year of Publication 29.05.2018
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Year of Publication 29.05.2018
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POLISHING PADS WITH IMPROVED PLANARIZATION EFFICIENCY
WEWALA GONNAGAHADENIYAGE, Shiyan Akalanka Jayanath, CHOCKALINGAM, Ashwin
Year of Publication 16.11.2023
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Year of Publication 16.11.2023
Patent
POLISHING PADS WITH IMPROVED PLANARIZATION EFFICIENCY
WEWALA GONNAGAHADENIYAGE, Shiyan Akalanka Jayanath, CHOCKALINGAM, Ashwin
Year of Publication 16.11.2023
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Year of Publication 16.11.2023
Patent
POLISHING PADS PRODUCED BY AN ADDITIVE MANUFACTURING PROCESS
FU BOYI, CHOCKALINGAM ASHWIN, YAMAMURA MAYU FELICIA, PATIBANDLA NAG B, DAVENPORT ROB, ORILALL MAHENDRA C, KHANNA ANIRUDDH JAGDISH, FUNG JASON G, KUMAR ASHAVANI, HARIHARAN VENKATACHALAM, CORNEJO MARIO, KAKIREDDY RAGHAVA, BAJAJ RAJEEV, NG HOU TEE, SINHA AMRITANSHU, REDFIELD DANIEL, MENK GREGORY E, REDEKER FRED C
Year of Publication 23.06.2017
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Year of Publication 23.06.2017
Patent
POLISHING PADS PRODUCED BY AN ADDITIVE MANUFACTURING PROCESS
FU BOYI, CHOCKALINGAM ASHWIN, YAMAMURA MAYU FELICIA, PATIBANDLA NAG B, DAVENPORT ROB, ORILALL MAHENDRA C, KHANNA ANIRUDDH JAGDISH, FUNG JASON G, KUMAR ASHAVANI, HARIHARAN VENKATACHALAM, CORNEJO MARIO, KAKIREDDY RAGHAVA, BAJAJ RAJEEV, NG HOU TEE, SINHA AMRITANSHU, REDFIELD DANIEL, MENK GREGORY E, REDEKER FRED C
Year of Publication 23.06.2017
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Year of Publication 23.06.2017
Patent
Impact of Thermal Properties of Pad Materials on CMP Process Stability
Khanna, Aniruddh Jagdish, Ramos, Jonathan J, Wang, You, Menk, Gregory, Kim, Jaeseok, Mamidana, Avinash, Tham, Benjamin, Fung, Jason, Jewett, Jason, Madhusoodhanan, Sudhakar, Pathak, Srikant, Jayanath, Shiyan, Chen, Ying, Lu, Xinyi, Hong, Qing, Chockalingam, Ashwin, Ali, Mahmood
Published in Meeting abstracts (Electrochemical Society) (09.08.2024)
Published in Meeting abstracts (Electrochemical Society) (09.08.2024)
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Journal Article
Computational Modeling of CMP Pads: Analyzing the Pad Geometry’s Impact on Planarization Efficiency
Salazar, Brian, Kakireddy, Raghava, Jayanth, Shiyan, Chockalingam, Ashwin, Bajaj, Rajeev, Taylor, Hayden
Published in Meeting abstracts (Electrochemical Society) (30.05.2021)
Published in Meeting abstracts (Electrochemical Society) (30.05.2021)
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Journal Article
Abrasive delivery polishing pads and manufacturing methods thereof
Bajaj, Rajeev, Redfield, Daniel, Chockalingam, Ashwin, Kumar, Ashavani
Year of Publication 13.12.2022
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Year of Publication 13.12.2022
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APPARATUS AND METHOD FOR SELECTIVE MATERIAL REMOVAL DURING POLISHING
WEWALA GONNAGAHADENIYAGE, Shiyan Akalanka Jayanath, CHOCKALINGAM, Ashwin, CHEN, Joshua, REDFIELD, Daniel
Year of Publication 13.07.2023
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Year of Publication 13.07.2023
Patent
APPARATUS AND METHOD FOR SELECTIVE MATERIAL REMOVAL DURING POLISHING
WEWALA GONNAGAHADENIYAGE, Shiyan Akalanka Jayanath, CHOCKALINGAM, Ashwin, CHEN, Joshua, REDFIELD, Daniel
Year of Publication 13.07.2023
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Year of Publication 13.07.2023
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Anionic polishing pads formed by printing processes
Ng, Hou T, Ganapathiappan, Sivapackia, Redfield, Daniel, Bajaj, Rajeev, Luo, Yingdong, Patibandla, Nag B, Sridhar, Uma, Chockalingam, Ashwin, Madhusoodhanan, Sudhakar
Year of Publication 26.12.2023
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Year of Publication 26.12.2023
Patent