Ion beam sputtering with ion assisted deposition for coatings on chamber components
Cho Tom K, Sun Jennifer Y, Firouzdor Vahid, Achutharaman Vedapuram S, Kanungo Biraja Prasad, Zhang Ying
Year of Publication 24.10.2017
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Year of Publication 24.10.2017
Patent
Ion beam sputtering with ion assisted deposition for coatings on chamber components
Cho Tom K, Sun Jennifer Y, Firouzdor Vahid, Achutharaman Vedapuram S, Kanungo Biraja Prasad, Zhang Ying
Year of Publication 08.08.2017
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Year of Publication 08.08.2017
Patent
Particle reduction via throttle gate valve purge
Lubomirsky, Dmitry, Nguyen, Andrew, Silveira, Fernando, Lee, Jared Ahmad, Englhardt, Eric A, Cho, Tom K, Salinas, Martin Jeff
Year of Publication 03.07.2018
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Year of Publication 03.07.2018
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Processing chamber and method for making a seal
CHO, TOM K, MAHESHWARI, SHAGUN PANKAJ, LEE, KING FAI, YU, ANDREW WEN WEI, LIAO, CHIEN-MIN, PAL, ANIRUDDHA, YANG, YAO-HUNG
Year of Publication 11.03.2024
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Year of Publication 11.03.2024
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APPARATUS FOR REMOVING PARTICLES FROM A TWIN CHAMBER PROCESSING SYSTEM
CHO TOM K, VISHWANATH YOGANANDA SARODE, RAMASWAMY KARTIK, NGUYEN ANDREW
Year of Publication 25.12.2014
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Year of Publication 25.12.2014
Patent
APPARATUS FOR REMOVING PARTICLES FROM A TWIN CHAMBER PROCESSING SYSTEM
CHO, TOM K, NGUYEN, ANDREW, VISHWANATH, YOGANANDA SARODE, RAMASWAMY, KARTIK
Year of Publication 24.12.2014
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Year of Publication 24.12.2014
Patent
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS
Cho Tom K, Sun Jennifer Y, Firouzdor Vahid, Achutharaman Vedapuram S, Kanungo Biraja Prasad, Zhang Ying
Year of Publication 10.11.2016
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Year of Publication 10.11.2016
Patent