Search Results - "CHO TOM K" :: K.UTB vyhledávací portál

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INLINE DPS CHAMBER HARDWARE DESIGN TO ENABLE AXIS SYMMETRY FOR IMPROVED FLOW CONDUCTANCE AND UNIFORMITY

by CHO, Tom K, SARODE VISHWANATH, Yogananda, NGUYEN, Andrew
Year of Publication 16.05.2019

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Inline DPS chamber hardware are design to enable axis symmetry for improved flow conductance and uniformity

by Nguyen, Andrew, Sarode Vishwanath, Yogananda, Cho, Tom K
Year of Publication 19.02.2019

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MEASURING CONCENTRATIONS OF RADICALS IN SEMICONDUCTOR PROCESSING

by MARK, Michael J, ALAJAJIAN, Gevork, CHO, Tom K, GOPALAN, Ramesh
Year of Publication 03.01.2019

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MEASURING CONCENTRATIONS OF RADICALS IN SEMICONDUCTOR PROCESSING

by MARK, Michael J, CHO, Tom K, GOPALAN, Ramesh, ALAJAJIAN, George
Year of Publication 29.11.2018

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MEASURING CONCENTRATIONS OF RADICALS IN SEMICONDUCTOR PROCESSING

by MARK, Michael J, ALAJAJIAN, Gevork, CHO, Tom K, GOPALAN, Ramesh
Year of Publication 29.11.2018

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METHODS FOR REPAIRING A RECESS OF A CHAMBER COMPONENT

by GROECHEL, David W, YAU, Wai-Fan, CHO, Tom K, YANG, Yao-Hung, PENG, Gang Grant, HOOSHDARAN, Frank F
Year of Publication 04.02.2021

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METHODS FOR REPAIRING A RECESS OF A CHAMBER COMPONENT

by GROECHEL, David W, YAU, Wai-Fan, CHO, Tom K, YANG, Yao-Hung, PENG, Gang Grant, HOOSHDARAN, Frank F
Year of Publication 04.02.2021

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Apparatus for manufacturing an electronic device, apparatus for manufacturing a semiconductor device, and method of estimating a gas concentration in a semiconductor processing chamber

by CHO, TOM K, MARK, MICHAEL J, GOPALAN, RAMESH, ALAJAJIAN, GEVORK
Year of Publication 11.02.2023

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Method and apparatus for actively tuning a plasma power source

by SALIMIAN, SIAMAK, WANG, RONGPING, CHO, TOM K
Year of Publication 16.02.2021

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METHOD TO REMOVE RESIDUAL CHARGE ON A ELECTROSTATIC CHUCK DURING THE DE-CHUCKING STEP

by BOYD, Wendell Glen, Jr, CHO, Tom, K, HIRAHARA, Robert, T
Year of Publication 21.09.2017

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METHOD AND SYSTEM FOR IMPROVING THE OPERATION OF SEMICONDUCTOR PROCESSING

by SHANBHAG, Jeevan, CHEN, Chun-Chung, SALIMIAN, Siamak, CHO, Tom K, YANG, Yao-Hung, LIAO, Chien-Min, GANON, David, LUIGI, Mariana, HUNTER, Earl, YANG, Hsui
Year of Publication 03.06.2021

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METHOD OF RECLAIMING A SEAL

by MAHESHWARI, Shagun P, PAL, Aniruddha, SALIMIAN, Siamak, CHO, Tom K, YANG, Yao-Hung, YEH, Yu-Chi, YU, Andrew
Year of Publication 12.03.2020

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METHOD OF RECLAIMING A SEAL

by MAHESHWARI, Shagun P, PAL, Aniruddha, SALIMIAN, Siamak, CHO, Tom K, YANG, Yao-Hung, YEH, Yu-Chi, YU, Andrew
Year of Publication 12.03.2020

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ACTIVE MONITORING SYSTEM FOR SUBSTRATE BREAKAGE PREVENTION

by CHO, Tom K, MA, Ying, WU, Stanley, SALEHPOUR, Ali
Year of Publication 07.02.2019

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ACTIVE MONITORING SYSTEM FOR SUBSTRATE BREAKAGE PREVENTION

by CHO, Tom K, MA, Ying, WU, Stanley, SALEHPOUR, Ali
Year of Publication 07.02.2019

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ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CHAMBER COMPONENTS

by Firouzdor, Vahid, Zhang, Ying, Achutharaman, Vedapuram S, Kanungo, Biraja Prasad, Sun, Jennifer Y, Cho, Tom K
Year of Publication 19.04.2018

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MULTINODE MULTI-USE O-RING AND METHOD FOR MAKING A SEAL

by MAHESHWARI, Shagun Pankaj, YU, Andrew Wen Wei, PAL, Aniruddha, CHO, Tom K, LEE, King Fai, YANG, Yao-Hung, LIAO, Chien-Min
Year of Publication 23.01.2020

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