Search Results - "CHO JAEYONG" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

High power electrostatic chuck with aperture-reducing plug in a gas hole

High power electrostatic chuck with aperture-reducing plug in a gas hole

by Cho, Jaeyong, Ramaswamy, Kartik, Zhang, Chunlei, Parkhe, Vijay D, Wang, Haitao
Year of Publication 08.09.2020

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Patent

SUBSTRATE SUPPORT WITH DUAL EMBEDDED ELECTRODES

SUBSTRATE SUPPORT WITH DUAL EMBEDDED ELECTRODES

by CHO JAEYONG, KRAUS PHILIP ALLAN
Year of Publication 10.04.2020

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Patent

System for coupling a voltage to portions of a substrate

System for coupling a voltage to portions of a substrate

by Amormino, Christian, Koh, Travis Lee, Cho, Jaeyong, Kraus, Philip Allan, Chua, Thai Cheng
Year of Publication 14.07.2020

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Patent

Method for substrate support with multiple embedded electrodes

Method for substrate support with multiple embedded electrodes

by KRAUS, PHILIP ALLAN, CHO, JAEYONG, CHUA, THAI CHENG
Year of Publication 11.05.2023

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Patent

SUBSTRATE SUPPORTS FOR SEMICONDUCTOR APPLICATIONS

SUBSTRATE SUPPORTS FOR SEMICONDUCTOR APPLICATIONS

by CHO JAEYONG, SIRMAN JOHN
Year of Publication 07.06.2012

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Patent

SEMICONDUCTOR SUBSTRATE SUPPORTS WITH EMBEDDED RF SHIELD

SEMICONDUCTOR SUBSTRATE SUPPORTS WITH EMBEDDED RF SHIELD

by Lubomirsky, Dmitry, Benjaminson, David, Grace, Michael, Kalnin, Nikolai, Cho, Jaeyong, Kaluarachchi, Don Channa K, Park, Soonam
Year of Publication 19.03.2020

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Patent

SEMICONDUCTOR SUBSTRATE SUPPORTS WITH EMBEDDED RF SHIELD

SEMICONDUCTOR SUBSTRATE SUPPORTS WITH EMBEDDED RF SHIELD

by KALNIN, Nikolai, KALUARACHCHI, Don Channa K, CHO, Jaeyong, GRACE, Michael, BENJAMINSON, David, LUBOMIRSKY, Dmitry, PARK, Soonam
Year of Publication 19.03.2020

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Patent

Advanced temperature control for wafer carrier in plasma processing chamber

Advanced temperature control for wafer carrier in plasma processing chamber

by ZHANG, CHUNLEI, SILVEIRA, FERNANDO M, CRIMINALE, PHILLIP, CHO, JAEYONG
Year of Publication 21.03.2023

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Patent

Substrate support with multiple embedded electrodes

Substrate support with multiple embedded electrodes

by CHU TZU CHENG, CHO JAEYONG, KRAUS PHILIP ALLAN
Year of Publication 14.03.2023

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Patent

SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES

SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES

by CHO, Jaeyong, HAMMOND, IV, Edward P, YE, Zheng John, SU, Zonghui, ZHOU, Jianhua, ROCHA-ALVAREZ, Juan Carlos, PARKHE, Vijay D, LIN, Xing
Year of Publication 23.09.2021

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Patent

SUBSTRATE SUPPORTS FOR SEMICONDUCTOR APPLICATIONS

SUBSTRATE SUPPORTS FOR SEMICONDUCTOR APPLICATIONS

by SIRMAN, JOHN, CHO, JAEYONG
Year of Publication 01.12.2011

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Patent

Sheath and temperature control of process kit in substrate processing chamber

Sheath and temperature control of process kit in substrate processing chamber

by ROGERS JAMES, CHO JAEYONG, HUSSAIN AMJAD, DHINDSA RAJINDER
Year of Publication 25.10.2022

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Patent

ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING CHAMBER

ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING CHAMBER

by Silveira Fernando M, Zhang Chunlei, Criminale Phillip, Cho Jaeyong
Year of Publication 09.11.2017

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Patent

ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING CHAMBER

ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING CHAMBER

by SILVEIRA, Fernando, M, CRIMINALE, Phillip, CHO, Jaeyong, ZHANG, Chunlei
Year of Publication 09.11.2017

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Patent

Advanced temperature control for wafer carrier in plasma processing chamber

Advanced temperature control for wafer carrier in plasma processing chamber

by CRIMINALE PHILLIP, CHO JAEYONG, SILVEIRA FERNANDO M, ZHANG CHUNLEI
Year of Publication 08.07.2022

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Patent

SYSTEM FOR COUPLING A VOLTAGE TO PORTIONS OF A SUBSTRATE

SYSTEM FOR COUPLING A VOLTAGE TO PORTIONS OF A SUBSTRATE

by CHUA, Thai Cheng, CHO, Jaeyong, KRAUS, Philip Allan, AMORMINO, Christian, KOH, Travis Lee
Year of Publication 28.03.2019

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Patent

SYSTEM FOR COUPLING A VOLTAGE TO PORTIONS OF A SUBSTRATE

SYSTEM FOR COUPLING A VOLTAGE TO PORTIONS OF A SUBSTRATE

by CHUA, Thai Cheng, CHO, Jaeyong, KRAUS, Philip Allan, AMORMINO, Christian, KOH, Travis Lee
Year of Publication 21.03.2019

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Patent

Shell layer and temperature control for processing accessories

Shell layer and temperature control for processing accessories

by CHO JAEYONG, RAMASWAMY KARTIK, BYUN DA-SOK
Year of Publication 04.03.2022

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Patent

High power electrostatic chuck with aperture-reducing plug in a gas hole, and method and chamber relating thereto

High power electrostatic chuck with aperture-reducing plug in a gas hole, and method and chamber relating thereto

by PARKHE, VIJAY D, ZHANG, CHUNLEI, WANG, HAITAO, CHO, JAEYONG, RAMASWAMY, KARTIK
Year of Publication 21.07.2023

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Patent

Substrate support assembly, processing chamber, and substrate processing system including substrate support with multiple embedded electrodes

Substrate support assembly, processing chamber, and substrate processing system including substrate support with multiple embedded electrodes

by KRAUS, PHILIP ALLAN, CHO, JAEYONG, CHUA, THAI CHENG
Year of Publication 11.09.2021

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Patent

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