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"CHKHALO NIKOLAY IVANOVICH"
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"CHKHALO NIKOLAY IVANOVICH"
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EUV multilayer mirror with interlayer and lithographic apparatus using the mirror
by
BANINE VADIM YEVGENYEVICH
,
SALASHCHENKO NIKOLAY NIKOLAEVITCH
,
GLUSHKOV DENIS ALEXANDROVICH
,
SJMAENOK LEONID AIZIKOVITCH
,
CHKHALO NIKOLAY IVANOVICH
Year of Publication
14.07.2015
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MULTILAYER MIRROR AND LITHOGRAPHIC APPARATUS
by
BANINE VADIM YEVGENYEVICH
,
SALASHCHENKO NIKOLAY NIKOLAEVITCH
,
GLUSHKOV DENIS ALEXANDROVICH
,
SJMAENOK LEONID AIZIKOVITCH
,
CHKHALO NIKOLAY IVANOVICH
Year of Publication
01.12.2011
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Multilayer mirror and lithographic projection apparatus
by
SALASHCHENKO, NIKOLAY NIKOLAEVITCH
,
SJMAENOK, LEONID AIZIKOVITCH
,
GLUSHKOV, DENIS ALEXANDROVICH
,
BANINE, VADIM YEVGENYEVICH
,
CHKHALO
,
NIKOLAY IVANOVICH
Year of Publication
11.06.2014
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Multilayer mirror and lithographic apparatus
by
SALASHCHENKO, NIKOLAY NIKOLAEVITCH
,
SJMAENOK, LEONID AIZIKOVITCH
,
GLUSHKOV, DENIS ALEXANDROVICH
,
BANINE, VADIM YEVGENYEVICH
,
CHKHALO
,
NIKOLAY IVANOVICH
Year of Publication
16.10.2010
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chemistry
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physics
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Topic
apparatus specially adapted therefor
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gamma ray or x-ray microscopes
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esp@cenet
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