CARBON NANOTUBE ELECTROSTATIC CHUCK
ANELLA, Steven M, SUN, Dawei, CHEN, Qin, CHIPMAN, David J, SERISKY, Ron, BLAKE, Julian G
Year of Publication 29.07.2021
Get full text
Year of Publication 29.07.2021
Patent
CARBON NANOTUBE ELECTROSTATIC CHUCK
Chipman, David J, Sun, Dawei, Anella, Steven M, Serisky, Ron, Chen, Qin, Blake, Julian G
Year of Publication 22.07.2021
Get full text
Year of Publication 22.07.2021
Patent
Carbon nanotube electrostatic chuck
Chipman, David J, Sun, Dawei, Anella, Steven M, Serisky, Ron, Chen, Qin, Blake, Julian G
Year of Publication 20.07.2021
Get full text
Year of Publication 20.07.2021
Patent
Platen, assembly for holding workpiece, and electrostatic chuck
SUN, DA-WEI, CHIPMAN, DAVID J, ANELLA, STEVEN M, RON, SERISKY, BLAKE, JULIAN G, CHEN, QIN
Year of Publication 16.11.2021
Get full text
Year of Publication 16.11.2021
Patent
Apparatus for the backside gas cooling of a wafer in a batch ion implantation system
Chipman, David J, Lagos, Bryan C, Mitchell, Robert J, Rosen, Gary, Stone, Dale K
Year of Publication 24.06.2003
Get full text
Year of Publication 24.06.2003
Patent
Apparatus for the backside gas cooling of a wafer in a batch ion implantation system
CHIPMAN DAVID J, MITCHELL ROBERT J, STONE DALE K, ROSEN GARY, LAGOS BRYAN C
Year of Publication 24.06.2003
Get full text
Year of Publication 24.06.2003
Patent