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Method for forming suspended transmission line structures in back end of line processing
by
CHINTHAKINDI ANIL K
.,
GROVES ROBERT A
.,
TRETIAKOV YOURI V
.,
VAED KUNAL
,
VOLANT RICHARD P
Year of Publication
11.04.2007
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Patent
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chemistry
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medicine
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sciences
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Topic
basic electric elements
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electric solid state devices not otherwise provided for
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electricity
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resonators, lines, or other devices of the waveguide type
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semiconductor devices
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waveguides
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English
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esp@cenet
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