Design and Characterization of a Dual-Mode CMOS-MEMS Resonator for TCF Manipulation
Li, Ming-Huang, Chen, Chao-Yu, Li, Cheng-Syun, Chin, Chi-Hang, Li, Sheng-Shian
Published in Journal of microelectromechanical systems (01.04.2015)
Published in Journal of microelectromechanical systems (01.04.2015)
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Journal Article
A Low-Voltage CMOS-Microelectromechanical Systems Thermal-Piezoresistive Resonator With Q > 10\,000
Cheng-Syun Li, Ming-Huang Li, Cheng-Chi Chen, Chi-Hang Chin, Sheng-Shian Li
Published in IEEE electron device letters (01.02.2015)
Published in IEEE electron device letters (01.02.2015)
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Journal Article
Differentially Piezoresistive Sensing for CMOS-MEMS Resonators
Li, Cheng-Syun, Li, Ming-Huang, Chin, Chi-Hang, Li, Sheng-Shian
Published in Journal of microelectromechanical systems (01.12.2013)
Published in Journal of microelectromechanical systems (01.12.2013)
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Journal Article
A CMOS-MEMS arrayed resonant-gate field effect transistor (RGFET) oscillator
Chin, Chi-Hang, Li, Ming-Huang, Chen, Chao-Yu, Wang, Yu-Lin, Li, Sheng-Shian
Published in Journal of micromechanics and microengineering (01.11.2015)
Published in Journal of micromechanics and microengineering (01.11.2015)
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Journal Article
LAPS with nanoscaled and highly polarized HfO2 by CF4 plasma for NH4+ detection
Yang, Jung-Hsiang, Lu, Tseng-Fu, Wang, Jer-Chyi, Yang, Chia-Ming, Pijanowska, Dorota G., Chin, Chi-Hang, Lue, Cheng-En, Lai, Chao-Sung
Published in Sensors and actuators. B, Chemical (01.04.2013)
Published in Sensors and actuators. B, Chemical (01.04.2013)
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Journal Article
Statistical characterizaton of a CMOS-MEMS resonator for monolithic ovenized oscillator applications
Chao-Yu Chen, Chi-Hang Chin, Ming-Huang Li, Sheng-Shian Li
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01.06.2015)
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Conference Proceeding
An ultra-low power ovenized CMOS-MEMS resonator monolithically integrated with interface circuits
Li, Ming-Huang, Li, Cheng-Syun, Chin, Chi-Hang, Chen, Chao-Yu, Li, Sheng-Shian
Published in 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2013)
Published in 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2013)
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Conference Proceeding
Journal Article
Foundry-CMOS integrated oscillator circuits based on ultra-low power ovenized CMOS-MEMS resonators
Li, Ming-Huang, Chen, Chao-Yu, Li, Cheng-Syun, Chin, Chi-Hang, Chen, Cheng-Chi, Li, Sheng-Shian
Published in 2013 IEEE International Electron Devices Meeting (01.12.2013)
Published in 2013 IEEE International Electron Devices Meeting (01.12.2013)
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Conference Proceeding
Journal Article
Capacitively-driven and piezoresistively-sensed CMOS-MEMS resonators
Cheng-Syun Li, Chi-Hang Chin, Yu-Chia Liu, Sheng-Shian Li
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2012)
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2012)
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Conference Proceeding
Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators
Wei-Siang Tan, Fang, Grace W., Gayathri Pillai, Cheng-Chi Chen, Chao-Yu Chen, Chi-Hang Chin, Sheng-Shian Li
Published in 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (01.04.2016)
Published in 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) (01.04.2016)
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Conference Proceeding
A CMOS-MEMS arrayed RGFET
Chi-Hang Chin, Sheng-Shian Li
Published in 2014 IEEE International Frequency Control Symposium (FCS) (01.05.2014)
Published in 2014 IEEE International Frequency Control Symposium (FCS) (01.05.2014)
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Conference Proceeding
Combined electrical and mechanical coupling for mode-reconfigurable CMOS-MEMS filters
Chao-Yu Chen, Ming-Huang Li, Chi-Hang Chin, Cheng-Syun Li, Sheng-Shian Li
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2014)
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2014)
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Conference Proceeding
Multimode characteristics of high-frequency CMOS-MEMS resonators
Jaesung Lee, Cheng-Syun Li, Ming-Huang Li, Chi-Hang Chin, Sheng-Shian Li, Feng, Philip X.-L
Published in 2014 IEEE International Frequency Control Symposium (FCS) (01.05.2014)
Published in 2014 IEEE International Frequency Control Symposium (FCS) (01.05.2014)
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Conference Proceeding
A CMOS-MEMS resonant gate field effect transistor
Chi-Hang Chin, Cheng-Syun Li, Ming-Huang Li, Sheng-Shian Li
Published in 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (01.06.2013)
Published in 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (01.06.2013)
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Conference Proceeding
A piezoresistive CMOS-MEMS resonator with high Q and low TCf
Cheng-Syun Li, Ming-Huang Li, Chi-Hang Chin, Chao-Yu Chen, Sheng-Shian Li, Feng, Philip X.-L
Published in 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (01.07.2013)
Published in 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC) (01.07.2013)
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Conference Proceeding