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Year of Publication 15.03.2022
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Year of Publication 15.03.2022
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Year of Publication 15.03.2022
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Year of Publication 15.03.2022
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EUV lithography system with 3D sensing and tunning modules
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Year of Publication 26.12.2023
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Year of Publication 26.12.2023
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Wafer stage and method thereof
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Year of Publication 17.01.2023
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Year of Publication 17.01.2023
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EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
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Year of Publication 30.11.2023
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Year of Publication 30.11.2023
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EUV light source and apparatus for lithography
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Year of Publication 28.11.2023
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Year of Publication 28.11.2023
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LITHOGRAPHY SYSTEM AND METHODS
Tsai, Ming-Hsun, Chen, Li-Jui, Chien, Shang-Chieh, Cho, Hung-Wen, Chuang, Jyun-Yan, Cheng, Wei-Shin, Liu, Heng-Hsin
Year of Publication 23.11.2023
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Year of Publication 23.11.2023
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METHODS OF CLEANING A LITHOGRAPHY SYSTEM
CHEN, Tai-Yu, CHEN, Li-Jui, YU, Sheng-Kang, HSIEH, Chieh, LIU, Heng-Hsin, LIN, Cho-Ying, CHIEN, Shang-Chieh
Year of Publication 23.11.2023
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Year of Publication 23.11.2023
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RETICLE CLEANING DEVICE AND METHOD OF USE
CHEN, Li-Jui, YU, Sheng-Kang, LIU, Heng-Hsin, CHIEN, Shang-Chieh, HSU, Che-Chang
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
TSAI, Cheng Hung, CHEN, Li-Jui, YU, Sheng-Kang, LIU, Heng-Hsin, CHIEN, Shang-Chieh
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
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SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING THE SAME
CHEN, Li-Jui, YU, Sheng-Kang, LIU, Heng-Hsin, PAN, Tzu-Jung, CHIEN, Shang-Chieh
Year of Publication 22.12.2022
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Year of Publication 22.12.2022
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EUV RADIATION SOURCE APPARATUS FOR LITHOGRAPHY
CHEN, Li-Jui, YU, Sheng-Kang, YEN, Wei-Chun, CHIEN, Shang-Chieh, CHEN, Yu-Chih, CHENG, Po-Chung
Year of Publication 01.12.2022
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Year of Publication 01.12.2022
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EUV radiation source apparatus for lithography
Yen, Wei-Chun, Chen, Li-Jui, Chien, Shang-Chieh, Yu, Sheng-Kang, Chen, Yu-Chih, Cheng, Po-Chung
Year of Publication 29.11.2022
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Year of Publication 29.11.2022
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Method for using radiation source apparatus
Wu, Cheng-Hsuan, Lo, Yu-Fa, Lai, Cheng-Hao, Cheng, Wei-Shin, Chen, Yu-Huan, Tsai, Ming-Hsun, Chen, Li-Jui, Chien, Shang-Chieh, Yu, Sheng-Kang, Chen, Hsin-Feng, Cheng, Chiao-Hua, Sun, Yu-Kuang, Liu, Heng-Hsin
Year of Publication 17.09.2024
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Year of Publication 17.09.2024
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Lithography thermal control
Lin, Cho-Ying, Wu, Zhiqiang, Chen, Tai-Yu, Chen, Li-Jui, Chien, Shang-Chieh, Yu, Sheng-Kang, Lam, Kai Tak, Khivsara, Sagar Deepak, Chen, Hsiang, Liu, Heng-Hsin, Hsieh, Chieh
Year of Publication 17.09.2024
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Year of Publication 17.09.2024
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METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LITHOGRAPHY SYSTEM
CHEN, Li-Jui, HSIEH, Chieh, CHEN, Ssu-Yu, FU, Tzung-Chi, YANG, Chi, CHIEN, Shang-Chieh, LIU, Bo-Tsun, CHENG, Po-Chung
Year of Publication 12.10.2023
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Year of Publication 12.10.2023
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RADIATION SOURCE APPARATUS AND METHOD FOR USING THE SAME
CHEN, Li-Jui, YU, Sheng-Kang, LIU, Heng-Hsin, TU, Wei-Chung, CHIEN, Shang-Chieh
Year of Publication 10.11.2022
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Year of Publication 10.11.2022
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METHOD AND APPARATUS FOR MITIGATING TIN DEBRIS
TSAI, Cheng Hung, CHEN, Li-Jui, YU, Sheng-Kang, LIU, Heng-Hsin, CHIEN, Shang-Chieh
Year of Publication 03.11.2022
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Year of Publication 03.11.2022
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WAFER STAGE AND METHOD THEREOF
CHEN, Li-Jui, LIU, Heng-Hsin, CHEN, Yu-Huan, HUANG, Yu-Chih, PENG, Ya-An, CHIEN, Shang-Chieh
Year of Publication 03.11.2022
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Year of Publication 03.11.2022
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