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Year of Publication 27.08.2021
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Year of Publication 15.11.2022
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Year of Publication 24.02.2022
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Year of Publication 27.10.2021
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Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
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Year of Publication 10.05.2022
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Year of Publication 14.05.2020
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Clamp apparatuses and plate apparatuses having sensors
CHIEDA, MICHAEL ANDREW, BROWN, AUSTIN, PEREZ-FALCON, VICTOR ANTONIO, SMITH, STEVEN LORY, GUNAWARDANA, RUVINDA VIPUL, MONKMAN, ERIC JUSTIN
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Year of Publication 01.05.2024
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Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
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Year of Publication 18.06.2019
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