MULTI-HEIGHT SEMICONDUCTOR STRUCTURES
CHANG, Tzong-Sheng, CHIANG, Tsung-Yu, TIEN, Bor-Zen, KUANG-HSIN, Chen
Year of Publication 06.02.2020
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Year of Publication 06.02.2020
Patent
Back-end-of-line (BEOL) arrangement with multi-height interlayer dielectric (ILD) structures
Chiang, Tsung-Yu, Kuang-Hsin, Chen, Tien, Bor-Zen, Chang, Tzong-Sheng
Year of Publication 24.12.2019
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Year of Publication 24.12.2019
Patent