Block copolymer technology applied to nanoelectronics
Tallegas, Salomé, Baron, Thierry, Gay, Guillaume, Aggrafeil, Claire, Salhi, Billel, Chevolleau, Thierry, Cunge, Gilles, Bsiesy, Ahmad, Tiron, Raluca, Chevalier, Xavier, Navarro, Christophe, Aissou, Karim, Otsuka, Issei, Halila, Sami, Fort, Sébastien, Borsali, Redouane
Published in Physica status solidi. C (01.09.2013)
Published in Physica status solidi. C (01.09.2013)
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Journal Article
Patterning Strategy for Monoelectronic Device Platform in a Complementary Metal Oxide Semiconductor Technology
Pauliac-Vaujour, Sebastien, Wacquez, Romain, Vizioz, Christian, Chevolleau, Thierry, Pierre, Mathieu, Previtali, Bernard, Comboroure, Corinne, Bove, Nadine, Roche, Benoit, Vinet, Maud, Jehl, Xavier, Sanquer, Marc, Sixt, Pierre
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
Patterning Strategy for Monoelectronic Device Platform in a Complementary Metal Oxide Semiconductor Technology
Pauliac-Vaujour, Sebastien, Wacquez, Romain, Vizioz, Christian, Chevolleau, Thierry, Pierre, Mathieu, Previtali, Bernard, Comboroure, Corinne, Bove, Nadine, Roche, Benoit, Vinet, Maud, Jehl, Xavier, Sanquer, Marc, Sixt, Pierre
Published in Japanese Journal of Applied Physics (01.06.2011)
Published in Japanese Journal of Applied Physics (01.06.2011)
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Journal Article
Atomic and Molecular Layer Deposition Area Selective Deposition using alternate deposition and etch super-cycle strategies
Bonvalot, Marceline, Vallee, Christophe, Mannequin, Cedric, Jaffal, Moustapha, Gassilloud, Remy, Posseme, Nicolas, Chevolleau, Thierry
Published in Dalton transactions : an international journal of inorganic chemistry (16.11.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (16.11.2021)
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Journal Article
DNA Origami for Silicon Patterning
Thomas, Guillaume, Diagne, Cheikh Tidiane, Baillin, Xavier, Chevolleau, Thierry, Charvolin, Thomas, Tiron, Raluca
Published in ACS applied materials & interfaces (12.08.2020)
Published in ACS applied materials & interfaces (12.08.2020)
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Journal Article
Area selective deposition using alternate deposition and etch super-cycle strategies
Bonvalot, Marceline, Vallée, Christophe, Mannequin, Cédric, Jaffal, Moustapha, Gassilloud, Rémy, Possémé, Nicolas, Chevolleau, Thierry
Published in Dalton transactions : an international journal of inorganic chemistry (04.01.2022)
Published in Dalton transactions : an international journal of inorganic chemistry (04.01.2022)
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Journal Article
MAM 2012 (selected contributions) March 11–14, Grenoble, France Minatec Campus
MAITREJEAN, Sylvain, FARCY, Alexis, CHEVOLLEAU, Thierry
Published in Microelectronic engineering (01.07.2013)
Published in Microelectronic engineering (01.07.2013)
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Journal Article
Innovative Gap-Fill Strategy for 28 nm Shallow Trench Isolation
Tavernier, Aurélien, Favennec, Laurent, Chevolleau, Thierry, Jousseaume, Vincent
Published in ECS transactions (27.04.2012)
Published in ECS transactions (27.04.2012)
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Journal Article
MAM2009: A single-session Workshop devoted to Materials Research, Materials Properties and Interactions: Proceedings of the Eighteenth European Workshop on Materials for Advanced Metallization 2009
CHEVOLLEAU, Thierry, CHENEVIER, Bernard, LARTIGUE, Colette
Published in Microelectronic engineering (2010)
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Published in Microelectronic engineering (2010)
Conference Proceeding
Efficiency of H 2 O Diffusion Barriers at Si-Si Direct Bonding Interfaces
Moriceau, Hubert, Rieutord, François, Libralesso, Laure, Ventosa, Caroline, Fournel, Frank, Morales, Christophe, McCormick, Tina, Chevolleau, Thierry, Radu, Ionut
Published in ECS transactions (01.10.2010)
Published in ECS transactions (01.10.2010)
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Journal Article
Porous SiOCH Integration: Etch Challenges with a Trench First Metal Hard Mask Approach
Possémé, Nicolas, David, Thibaut, Chevolleau, Thierry, Darnon, Maxime, Brun, Philippe, Guillermet, Marc, Oddou, Jean Pierre, Barnola, Sebastien, Bailly, Fanny, Bouyssou, Regis, Ducote, Julien, Hurand, Romain, Vérove, Christophe, Joubert, Olivier
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
NITROGEN-PLASMA SURFACE TREATMENT IN A DIRECT BONDING METHOD
RIEUTORD FRANCOIS, MORALES CHRISTOPHE, VENTOSA CAROLINE, MORICEAU HUBERT, CHEVOLLEAU THIERRY, LIBRALESSO LAURE
Year of Publication 07.02.2011
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Year of Publication 07.02.2011
Patent
Study of Porous SiOCH Patterning Using Metallic Hard Mask: Challenges and Solutions
Posseme, Nicolas, David, Thibaut, Chevolleau, Thierry, Darnon, Maxime, Bailly, Fanny, Bouyssou, Regis, Ducote, Julien, Chaabouni, Hamed, El Kodadi, Mohamed, Licitra, Christophe, Verove, Christophe, Joubert, Olivier
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
Porous SiOCH integration: etch challenges with a trench first metal hard mask approach
Possémé, Nicolas, David, Thibaut, Chevolleau, Thierry, Darnon, Maxime, Brun, Philippe, Guillermet, Marc, Oddou, Jean Pierre, Barnola, Sébastien, Bailly, Fanny, Bouyssou, Régis, Ducote, Julien, Hurand, Romain, Vérove, Christophe, Joubert, Olivier R.
Published in ECS transactions (2011)
Published in ECS transactions (2011)
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Journal Article
Development of Porosimetry Techniques for the Characterization of Plasma-Treated Porous Ultra Low-k Materials
Licitra, Christophe, Chevolleau, Thierry, Bouyssou, Regis, El Kodadi, Mohamed, Haberfehlner, Georg, Hazart, Jerome, Virot, Leopold, Besacier, Maxime, Posseme, Nicolas, Darnon, Maxime, Hurand, Romain, Schiavone, Patrick, Bertin, Francois
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
Dry Etch Challenges in Gate All Around Devices for sub 32 nm Applications
Barnola, Sebastien, Vizioz, Christian, Vulliet, Nathalie, Dupré, Cécilia, Ernst, Thomas, Gautier, Pauline, Arvet, Christian, Guillaumot, Bernard, Bernard, Emilie, Pauliac-Vaujeour, S., Comboroure, Corine, Hartmann, Jean-Michel, Borel, Stephan, Chevolleau, Thierry, Maffini-Alvaro, V, Becu, S
Published in ECS transactions (2009)
Published in ECS transactions (2009)
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Journal Article
Self-limiting etching method with multiple levels
Gourgon, Cécile, Chevolleau, Thierry, Darnon, Maxime, Desplats, Olivier
Year of Publication 18.11.2020
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Year of Publication 18.11.2020
Patent