Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography
Cherala, Anshuman, Schumaker, Philip, Mokaberi, Babak, Selinidis, Kosta, Choi, Byung Jin, Meissl, Mario J., Khusnatdinov, Niyaz N., LaBrake, Dwayne, Sreenivasan, S. V.
Published in IEEE/ASME transactions on mechatronics (01.02.2015)
Published in IEEE/ASME transactions on mechatronics (01.02.2015)
Get full text
Journal Article
Active wafer shape modulation using a multi-actuator chucking system
Cherala, Anshuman, Choi, Byung Jin, Lu, Xiaoming, Sreenivasan, S.V.
Published in Precision engineering (01.10.2014)
Published in Precision engineering (01.10.2014)
Get full text
Journal Article
Active wafer shape modulation using a multi-actuator chucking system
Cherala, Anshuman, Choi, Byung Jin, Lu, Xiaoming, Sreenivasan, S V
Published in Precision engineering (01.10.2014)
Published in Precision engineering (01.10.2014)
Get full text
Journal Article
Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors
Cherala, Anshuman, Chopra, Meghali, Yin, Bailey, Mallavarapu, Akhila, Singhal, Shrawan, Abed, Ovadia, Bonnecaze, Roger, Sreenivasan, S. V.
Published in IEEE transactions on nanotechnology (01.05.2016)
Published in IEEE transactions on nanotechnology (01.05.2016)
Get full text
Journal Article