Investigation of Ni/Co bilayer salicidation process for sub-40 nm gate technology
Jung, Eun Ji, Jung, Sug-Woo, Kim, Hyun-Su, Yun, Jong-Ho, Cheong, Seong Hwee, Kim, Byung Hee, Choi, Gil Heyun, Kim, Sung Tae, Chung, U-In, Moon, Joo Tae, Ryu, Byung Il
Published in Microelectronic engineering (01.12.2005)
Published in Microelectronic engineering (01.12.2005)
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Conference Proceeding
Investigation of Ni/Co bilayer salicidation process for sub-40nm gate technology
Jung, Eun Ji, Jung, Sug-Woo, Kim, Hyun-Su, Yun, Jong-Ho, Cheong, Seong Hwee, Kim, Byung Hee, Choi, Gil Heyun, Kim, Sung Tae, Chung, U-In, Moon, Joo Tae, Ryu, Byung Il
Published in Microelectronic engineering (01.12.2005)
Published in Microelectronic engineering (01.12.2005)
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Journal Article
SEMICONDUCTOR DEVICE WITH VERTICAL CHANNEL TRANSISTOR AND METHOD OF FABRICATING THE SAME
CHOI, GYU WAN, CHEONG, SEONG HWEE, KIM, JOON, KANG, MAN SUG, NAM, KI HONG
Year of Publication 20.11.2013
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Year of Publication 20.11.2013
Patent
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
KIM, TAEK JUNG, PARK, YOUNG WOOK, CHEONG, SEONG HWEE, KONG, MYUNG HO, KANG, MAN SUG, PARK, HEE SOOK
Year of Publication 12.03.2014
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Year of Publication 12.03.2014
Patent
CAPACITOR OF SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
KIM, TAE KYUN, PARK, DONG KYUN, CHEONG, SEONG HWEE, KANG, MAN SUG, PARK, HEE SOOK
Year of Publication 03.05.2012
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Year of Publication 03.05.2012
Patent
GATE STRUCTURES AND METHOD OF FORMING THE SAME
KIM, BYUNG HEE, CHEONG, SEONG HWEE, BAEK, JONG MIN, CHA, TAE HO, PARK, HEE SOOK, CHOI, GIL HEYUN
Year of Publication 28.10.2009
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Year of Publication 28.10.2009
Patent
METHOD OF FABRICATING SEMICONDUCTOR DEVICE HAVING BURIED WIRING
LEE, BYUNG HAK, CHEONG, SEONG HWEE, BAEK, JONG MIN, PARK, JAE HWA, PARK, HEE SOOK, CHA, TAE HO, KIM, SU KYOUNG, CHOI, GIL HEYUN
Year of Publication 26.08.2010
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Year of Publication 26.08.2010
Patent
Effect of a noble annealing system on nickel silicide formation
Sug-Woo Jung, Hyun-Su Kim, Eun-Ji Jung, Seong-Hwee Cheong, Jong-Ho Yun, Kwan-Jong Roh, Ja-Hum Ku, Gil-Heyun Choi, Sung-Tae Kim, U-In Chung, Joo-Tae Moon, Byung-Il Ryu
Published in 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004 (2004)
Published in 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, 2004. RTP 2004 (2004)
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Conference Proceeding
Trap Layer Engineered FinFET NAND Flash with Enhanced Memory Window
Ahn, Y., Choe, J.-D., Lee, J., Choi, D., Cho, E., Choi, B., Lee, S.-H., Sung, S.-K., Lee, C.-H., Cheong, S., Lee, D., Kim, S., Park, D., Ryu, B.-I.
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
Published in 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers (2006)
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Charge Trapping WN Nano-dots with /or without Nitride Sub-layer for FinFET FLASH Memory
Choe, Jeong-dong, Lee, Jong Jin, Ahn, Young Joon, Lee, Se-hoon, Choi, Byung Yong, Sung, Suk Kang, Cho, Eun Suk, Kim, Seung Beom, Cheong, Seong Hwee, Lee, Choong-ho, Chung, Ilsub, Park, Kyuncharn, Park, Donggun, Ryu, Byung-il
Published in 2006 64th Device Research Conference (01.06.2006)
Published in 2006 64th Device Research Conference (01.06.2006)
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Conference Proceeding
Methods of forming a gate structure
CHOI GIL-HEYUN, CHEONG SEONG-HWEE, PARK HEE-SOOK, CHA TAE-HO, KIM BYUNG-HEE, BAEK JONG-MIN
Year of Publication 26.03.2013
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Year of Publication 26.03.2013
Patent
Method of fabricating semiconductor device having buried wiring
CHOI GIL-HEYUN, LEE BYUNG-HAK, CHEONG SEONG-HWEE, PARK JAE-HWA, PARK HEE-SOOK, CHA TAE-HO, BAEK JONG-MIN, KIM SU-KYOUNG
Year of Publication 18.06.2013
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Year of Publication 18.06.2013
Patent
METHODS OF FORMING A GATE STRUCTURE
CHOI GIL-HEYUN, CHEONG SEONG-HWEE, PARK HEE-SOOK, CHA TAE-HO, KIM BYUNG-HEE, BAEK JONG-MIN
Year of Publication 14.07.2011
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Year of Publication 14.07.2011
Patent
APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICES AND SUBSTRATES
CHOI GIL-HEYUN, CHEONG SEONG-HWEE, LEE HO-KI, PARK JIN-HO, LEE SANG-WOO
Year of Publication 30.08.2012
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Year of Publication 30.08.2012
Patent