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"CHEON MIN-HO"
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"CHEON MIN-HO"
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Study on the Deposition Characteristics of Molybdenum Thin Films Deposited by the Thermal Atomic Layer Deposition Method Using MoO2Cl2 as a Precursor
by
Lee, Baek-Ju
,
Lee, Kyu-Beom
,
Cheon
,
Min
-
Ho
,
Seo, Dong-Won
,
Choi, Jae-Wook
Published in
Coatings (Basel)
(01.06.2023)
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SPUTTERING DEVICE CAPABLE OF SIMULTANEOUS COOLING AND HEATING
by
CHEON MIN HO
Year of Publication
05.01.2022
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SUBSTRATE PROCESSING APPARATUS
by
HWANG, Chul Joo
,
CHEON
,
Min Ho
Year of Publication
25.11.2021
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Apparatus for processing substrate
by
LEE KYU BEOM
,
CHEON MIN HO
,
SEO DONG WON
Year of Publication
22.08.2024
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Apparatus for processing substrate
by
KIM SANG YEOP
,
CHEON MIN HO
,
LEE BAEK JU
,
SEO DONG WON
Year of Publication
27.12.2023
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Layer deposition apparatus having a rotating gas turret
by
KIM SANG YEOP
,
CHEON MIN HO
,
LEE BAEK JU
,
SEO DONG WON
Year of Publication
21.12.2023
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Gas injection apparatus and substrate processing equipment using the same
by
KIM SANG YEOP
,
CHEON MIN HO
,
LEE BAEK JU
,
SEO DONG WON
Year of Publication
16.10.2023
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Substrate processing apparatus having vertical loading chamber
by
RYU HUI SEONG
,
CHEON MIN HO
,
SEO DONG WON
Year of Publication
14.09.2023
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GAS SUPPLY DEVICE
by
LEE KYU BEOM
,
CHEON MIN HO
,
SEO DONG WON
Year of Publication
14.09.2023
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Gas supply apparatus
by
LEE KYU BEOM
,
CHEON MIN HO
,
SEO DONG WON
Year of Publication
12.09.2023
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PROCESS CHAMBER FOR SEMICONDUCTOR
by
KIM SANG YEOP
,
CHEON MIN HO
,
LEE BAEK JU
,
SEO DONG WON
Year of Publication
11.09.2023
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PROCESS CHAMBER FOR SEMICONDUCTOR
by
KIM SANG YEOP
,
CHEON MIN HO
,
LEE BAEK JU
,
SEO DONG WON
Year of Publication
11.09.2023
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Layer deposition apparatus having exhaust ports for multi-stage substrates
by
KIM SANG YEOP
,
CHEON MIN HO
,
SEO DONG WON
Year of Publication
18.07.2023
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SUBSTRATE PROCESS DEVICE
by
CHEON MIN HO
,
LEE BAEK JU
,
SEO DONG WON
Year of Publication
26.04.2023
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VACUUM DEPOSITION DEVICE
by
CHEON MIN HO
,
SON JEONG HEON
Year of Publication
02.07.2021
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MAGNET CLAMP AND APPARATUS FOR TRANSFERRING SUBSTRATE COMPRISING THE SAME
by
KIM CHOONG KI
,
KIM NAM HOON
,
CHEON MIN HO
Year of Publication
04.10.2022
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THIN FILM DEPOSITION APPARATUS HAVING MULTI-STAGE HEATERS AND THIN FILM DEPOSITION METHOD USING THE SAME
by
KIM SANG BO
,
WOO RAM
,
LEE JIN HWAN
,
LEE SEUNG JUN
,
CHEON MIN HO
Year of Publication
13.07.2023
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Layer deposition apparatus capable of controlling temperature of a multi-stage substrate chamber
by
KIM SANG YEOP
,
WOO RAM
,
CHEON MIN HO
,
LEE BAEK JU
,
SEO DONG WON
Year of Publication
11.07.2023
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Layer deposition apparatus having multi-stage heaters and layer deposition method using the same
by
KIM SANG BO
,
WOO RAM
,
LEE JIN HWAN
,
LEE SEUNG JUN
,
CHEON MIN HO
Year of Publication
07.07.2023
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VACUUM DEPOSITION DEVICE
by
LEE KI TAE
,
CHEON MIN HO
Year of Publication
08.01.2020
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