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Year of Publication 03.05.2024
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Temperature uniformity measuring mechanism for silicon epitaxy equipment
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Year of Publication 12.12.2023
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Silicon carbide epitaxial furnace growth unit
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Year of Publication 27.10.2023
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Year of Publication 27.10.2023
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Top cover structure of reaction chamber of silicon carbide epitaxial furnace
HAO XIAOFENG, SHEN HENGWEN, GAO YUEHUA, CHENG XUANLIN, LIU TONGHUI, KIM SU-YOUNG
Year of Publication 27.10.2023
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Year of Publication 27.10.2023
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Reaction chamber structure of silicon epitaxy equipment
YANG QIANSHUN, LI YOUPENG, WANG WEIKANG, CHEN LYU, CHENG XUANLIN, JI SHUANGPING
Year of Publication 24.10.2023
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Year of Publication 24.10.2023
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Graphite quick release structure of silicon carbide epitaxy equipment
HAO XIAOFENG, SHEN HENGWEN, GAO YUEHUA, CHENG XUANLIN, LIU TONGHUI, KIM SU-YOUNG
Year of Publication 24.10.2023
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Year of Publication 24.10.2023
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